MOEMS vector hydrophone

A technology of vector hydrophones and optical fiber collimators, applied in instruments, measuring devices, and measuring ultrasonic/sonic/infrasonic waves, etc., can solve problems such as low signal-to-noise ratio of hydrophones, susceptibility to electromagnetic interference, and signal interference. Achieve the effects of small signal attenuation, small overall size, and low energy consumption

Active Publication Date: 2015-11-25
BEIJING INST OF AEROSPACE CONTROL DEVICES
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, no matter the co-vibration piezoelectric vector hydrophone or the single-vector hydrophone developed by MEMS technology, they are all active devices, which require power supply when used, and are susceptible to electromagnetic interference, especially whe

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  • MOEMS vector hydrophone
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  • MOEMS vector hydrophone

Examples

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Example Embodiment

[0016] A MOEMS vector hydrophone, including: optical fiber 1, optical fiber collimator 2, base 3, silicon-based frame 4, cantilever beam 5 and miniature cylinder 6; figure 1 As shown, the silicon-based frame 4 is a square frame structure, with a cantilever beam 5 erected in the center; the cantilever beam 5 is a cross-shaped structure, and a platform 51 is provided at the midpoint of the four sides of the "cross" and the intersection of the "cross". The platform 51 is a square , The back of the platform 51 is plated with a reflective film 7 with a reflectivity of not less than 95%; the base 3 has a square structure, such as figure 2 As shown, a mounting slot 31 with a size matching the outer contour of the silicon-based frame 4 is opened in the center. The center position of the platform 51 on the four sides of the "cross" of the cantilever beam 5 corresponds to the mounting hole 32 at the corresponding position in the mounting slot 31. The base frame 4 is installed in the insta...

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Abstract

The invention relates to an MOEMS vector hydrophone comprising a fiber (1), fiber collimators (2), a base (3), a silicon-based framework (4), a cantilever beam (5), and a micro cylinder (6). The cantilever beam (5) is erected at the center of the silicon-based framework (4) and is installed in the base (3). The fiber collimators (2) is installed in mounting holes (32) of the base (3); and the fiber collimators (2) and a corresponding platform (51) arranged on the cantilever beam (5) form an F-P cavity (16). The micro cylinder (6) is installed on the corresponding platform (51) at the cross-shaped intersection position of the cantilever beam (5). One end of the fiber (1) is connected with the fiber collimators (2) and the other end is connected to an external optical path demodulation device. According to the invention, acoustic-mechanical-optical conversion is carried out by the F-P cavity. With combination of the MEMS technology and the fiber sensing technology by the MOEMS technology, requirements of miniaturization, low power consumption, and electromagnetic interference prevention can be realized; and the front-side power-free state of the hydrophone as well as high-sensitivity high-resolution detection of a weak acoustic signal can be realized.

Description

technical field [0001] The invention relates to a vector hydrophone in the field of MOEMS sensing. Background technique [0002] Vector hydrophone, as a sensor capable of time synchronization and space co-point measurement of underwater sound field vector information, has a wide application prospect in ocean engineering and ocean development. At present, the vector hydrophone is more common in the same vibration type. For example, the Chinese invention patent No. ZL200910072009.2 discloses a "three-dimensional vector hydrophone based on piezoelectric velocity sensor", which consists of three The piezoelectric speed sensor is connected sequentially by connecting rods, and picks up the acoustic signal by synchronously vibrating with the water particle. In the application process of the vector hydrophone, it was found that in order to ensure the low-frequency sensitivity of the co-vibration piezoelectric vector hydrophone, as the frequency decreases, the volume becomes larger ...

Claims

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Application Information

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IPC IPC(8): G01H9/00
Inventor 李振于文鹏王学锋殷爱民何哲玺张磊郝良彬
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
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