High-temperature mechanical property in-situ tension test system and method for small-sized monocrystalline silicon test piece

A high-temperature mechanics and testing system technology, applied in the direction of applying stable tension/pressure to test the strength of materials, can solve the problems of large differences in small-sized structures, and achieve the effect of easy implementation and simple structure

Active Publication Date: 2015-11-25
BEIHANG UNIV
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Problems solved by technology

At this time, the mechanical properties of large-scale specimens are quite different from those of small-scale s

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  • High-temperature mechanical property in-situ tension test system and method for small-sized monocrystalline silicon test piece
  • High-temperature mechanical property in-situ tension test system and method for small-sized monocrystalline silicon test piece
  • High-temperature mechanical property in-situ tension test system and method for small-sized monocrystalline silicon test piece

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[0026] The present invention is an in-situ tensile testing system and method for high-temperature mechanical properties of single crystal silicon small-size specimens, and its specific implementation is as follows:

[0027] Such as figure 1 As shown, the system of the present invention consists of a load control system, an in-situ testing machine 1, a special fixture 2, a special test piece 3, a temperature control system, a heating table 4, a cooling water system, and an SEM observation system. The special test piece 3 is specially designed and fixed to the in-situ testing machine 1 through a special fixture 2. The in-situ testing machine 1 is connected to the load control system through a data line; the heating table 4 is connected to the temperature control system through a data line, and is mechanically fixed to On the in-situ testing machine 1 and below the special test piece 3, heat the special test piece 3; the water cooling channel inside the heating table 4 is connected w...

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Abstract

The invention discloses a high-temperature mechanical property in-situ tension test system and method for a small-sized monocrystalline silicon test piece. The system comprises a load control system, an in-situ testing machine, a special jig, the purpose-made test piece, a temperature control system, a heating table, a cooling water system and an SEM observing system. By the adoption of the system and method, the high-temperature mechanical property of the small-sized monocrystalline silicon test piece is tested through a uniaxial drawing method.

Description

technical field [0001] The invention belongs to the field of testing mechanical properties of materials, in particular to a system and method for in-situ tensile testing of high-temperature mechanical properties of small-sized monocrystalline silicon specimens. Background technique [0002] As the most commonly used semiconductor material, single crystal silicon materials are widely used in electromechanical systems (MEMS) due to their good micromachining characteristics. Previous studies have paid less attention to the mechanical properties of single crystal silicon materials, especially the mechanical properties at high temperatures. performance. With the development of MEMS technology, micromachining technology has been very mature, people began to engage in the research of mechanical miniaturization to meet the needs of some special fields. For example, in the 1990s, the U.S. Defense Advance Research Agency proposed the concept of Micro Aircraft (MAV). As one of the key...

Claims

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Application Information

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IPC IPC(8): G01N3/18
Inventor 胡殿印张龙刘辉王荣桥申秀丽
Owner BEIHANG UNIV
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