Calculated intensity correlated imaging autocollimator and measurement method

A technology of correlative imaging and autocollimation, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of limited accuracy and significantly improve measurement accuracy, so as to reduce the jump of indication value, reduce the influence of atmospheric disturbance, The effect of improving sensitivity and stability

Active Publication Date: 2015-12-16
BEIJING INST OF AEROSPACE CONTROL DEVICES
View PDF6 Cites 18 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, whether it is a linear array CCD or an area array CCD photoelectric autocollimator, its accuracy is limited by parameters such as the number of CCD pixels and pixel size. Improve the measu...

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Calculated intensity correlated imaging autocollimator and measurement method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0027] A calculation intensity correlation imaging autocollimator and measurement method of the present invention will be described in further detail below with reference to the accompanying drawings.

[0028] like figure 1 As shown in the figure: 1. Light source; 2. DMD; 3. Controller; 4. Beam splitter; 5. Lens; 6. Reflector of the DUT; 7. CCD;

[0029] An autocollimator for computing intensity correlation imaging, comprising: a light source 1, a digital micromirror array DMD2, a controller 3, a beam splitter 4, a lens 5, a reflector for a test piece 6, a CCD7, and an intensity correlation computing module 8; The device 3 includes a light source modulation module and a synchronization control module;

[0030] The digital micromirror array DMD2 includes multiple micromirror arrays, each micromirror array can be flipped in two directions of +12° and -12°. The light source 1 illuminates the micromirror array of the digital micromirror array DMD2, and the controller The light s...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

Disclosed are a calculated intensity correlated imaging autocollimator and a measurement method. The calculated intensity correlated imaging autocollimator comprises a light source, a digital micromirror device (DMD), a controller, a beam splitter, a lens, a device-under-test (DUT) reflective mirror, a CCD and an intensity correlated calculation module. A synchronous control module of the controller generates a synchronous clock signal which is applied to the DMD and the CCD. The intensity correlated calculation module records a light field modulation matrix generated by a light field modulation module and an echo signal received by the CCD simultaneously, and performs second-order intensity correlated calculation to indirectly calculate a tiny rotation angle of the DUT. The invention introduces a calculated correlated imaging method in quantum imaging technology to the design of the autocollimator, and can be used for effectively reducing the measurement errors caused by air turbulence and other factors and improving the sensitivity and stability of a system.

Description

technical field [0001] The invention relates to a computational intensity correlation imaging autocollimator and a measurement method, and belongs to the field of precision testing and measuring instruments. Background technique [0002] Autocollimator (also known as self-collimation micro collimator) is a testing instrument that uses the principle of self-collimation to measure small angles. It converts the rotation angle of the mirror on the test piece into the change of the line quantity on the receiving device of the autocollimator, and indirectly detects the slight angle change of the reflective surface by measuring the change of the line quantity. Autocollimator is mainly used in small angle measurement, flatness and parallelism measurement, etc. It is a commonly used measuring instrument in machinery manufacturing, aerospace industry, metrology, scientific research and other departments. [0003] Most of the autocollimators commonly used at this stage are CCD photoel...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01B11/26
Inventor 赵连洁霍娟杨然李明飞张安宁刘院省莫小范
Owner BEIJING INST OF AEROSPACE CONTROL DEVICES
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap