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Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof

An acceleration sensor and acceleration technology, applied in the measurement of acceleration, speed/acceleration/shock measurement, instruments, etc., can solve the problems of complex sensor structure and poor quality consistency, and achieve low temperature coefficient, good consistency, and good quality consistency. Effect

Inactive Publication Date: 2015-12-16
ZHONGBEI UNIV
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  • Abstract
  • Description
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  • Application Information

AI Technical Summary

Problems solved by technology

The existing optical fiber Fab acceleration sensor, the sensor is assembled with components, which makes the structure of the sensor complex
Single-manufacturing fiber optic FAP sensor, poor quality consistency in mass production

Method used

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  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof
  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof
  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof

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Embodiment Construction

[0021] The present invention will be further described below in conjunction with accompanying drawing:

[0022] Such as figure 1 As shown, a fiber optic MEMS Fab acceleration sensor includes a housing 1, an optical fiber sleeve 2, an optical fiber 3, a semi-reverse surface 4, a reflective surface 5, an acceleration sensing element 6 and a base 7; wherein, the housing 1, the acceleration sensing element 6 The outer diameter of the component and the base 7 is the same, and the three are aligned from top to bottom in sequence and connected by MEMS bonding technology; the outer shell 1 is provided with a through hole along its vertical axis, and the optical fiber sleeve 2 is inserted into the outer shell 1 In the through hole, the optical fiber 3 is inserted into the optical fiber sleeve 2, the light-emitting surface of the optical fiber 3 is polished or coated with a semi-reflective film as the semi-reverse surface 4, and the surface at the center of the acceleration sensitive el...

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PUM

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Abstract

The invention provides an optical fiber MEMS Fabry-Perot acceleration sensor and a manufacturing method thereof. The acceleration sensor is mainly composed of a shell, an optical fiber, an acceleration sensitive element and a pedestal. The shell, the acceleration sensitive element and the pedestal of the sensor are processed by adopting an MEMS technology. Fixing of the pedestal, the acceleration sensitive element and the shell is realized via an MEMS bonding technology. The optical fiber is fixed in an optical fiber bushing. Fixing of the optical fiber and the shell is realized via a fusion welding technology. A mass block is processed at the center of the acceleration sensitive element via the MEMS technology, and the mass block on the light emergent surface of the optical fiber and the acceleration sensitive element is arranged in parallel so that a Fabry-Perot cavity is formed, and high-sensitivity measurement can be realized. The optical fiber MEMS Fabry-Perot acceleration sensor has advantages of small size, mass production, great consistency, low temperature coefficient and high temperature resistance so that acceleration measurement under conventional and special environments can be met.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a fiber MEMS method for accelerating the acceleration sensor and a manufacturing method thereof. Background technique [0002] With the development of modern industry, many fields will involve acceleration measurement, especially some special applications, such as high temperature, cavity electromagnetic, strong corrosion and other occasions. The traditional acceleration sensor is to detect the vibration of the sensitive mass, convert the vibration information into parameters such as resistance, capacitance, voltage, etc., and extract the acceleration information through the peripheral circuit. This type of sensor is difficult to apply to aerospace, oil exploration and other flammable Explosive harsh environment. Due to the characteristics of high sensitivity, large dynamic range, fast response, anti-electromagnetic interference and easy multiplexing of optical fib...

Claims

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Application Information

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IPC IPC(8): G01P15/00
Inventor 贾平岗熊继军梁庭洪应平曹群房国成薛晨阳刘俊张文栋
Owner ZHONGBEI UNIV
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