Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof

An acceleration sensor and acceleration technology, applied in the measurement of acceleration, speed/acceleration/shock measurement, instruments, etc., can solve the problems of complex sensor structure and poor quality consistency, and achieve low temperature coefficient, good consistency, and good quality consistency. Effect

Inactive Publication Date: 2015-12-16
ZHONGBEI UNIV
View PDF14 Cites 23 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The existing optical fiber Fab acceleration sensor, the sensor is assembled with components, which makes the struc

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof
  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof
  • Optical fiber MEMS Fabry-Perot acceleration sensor and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Example Embodiment

[0021] The present invention will be further described below in conjunction with the drawings:

[0022] Such as figure 1 As shown, an optical fiber MEMS Fabry-Perot acceleration sensor includes a housing 1, an optical fiber sleeve 2, an optical fiber 3, a half-reverse surface 4, a reflecting surface 5, an acceleration sensitive element 6 and a base 7; wherein, the housing 1, the acceleration sensitive element 6 The outer diameter of the component and the base 7 are the same, and the three are arranged in order from top to bottom and connected by MEMS bonding technology; the housing 1 is provided with a through hole along its vertical axis, and the optical fiber sleeve 2 is inserted in the housing 1 In the through hole, the optical fiber 3 is inserted into the optical fiber sleeve 2, the light-emitting surface of the optical fiber 3 is polished or coated with a semi-reflective coating as the half-reverse surface 4, the center surface of the acceleration sensor 6 is polished or coat...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides an optical fiber MEMS Fabry-Perot acceleration sensor and a manufacturing method thereof. The acceleration sensor is mainly composed of a shell, an optical fiber, an acceleration sensitive element and a pedestal. The shell, the acceleration sensitive element and the pedestal of the sensor are processed by adopting an MEMS technology. Fixing of the pedestal, the acceleration sensitive element and the shell is realized via an MEMS bonding technology. The optical fiber is fixed in an optical fiber bushing. Fixing of the optical fiber and the shell is realized via a fusion welding technology. A mass block is processed at the center of the acceleration sensitive element via the MEMS technology, and the mass block on the light emergent surface of the optical fiber and the acceleration sensitive element is arranged in parallel so that a Fabry-Perot cavity is formed, and high-sensitivity measurement can be realized. The optical fiber MEMS Fabry-Perot acceleration sensor has advantages of small size, mass production, great consistency, low temperature coefficient and high temperature resistance so that acceleration measurement under conventional and special environments can be met.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensing, in particular to a fiber MEMS method for accelerating the acceleration sensor and a manufacturing method thereof. Background technique [0002] With the development of modern industry, many fields will involve acceleration measurement, especially some special applications, such as high temperature, cavity electromagnetic, strong corrosion and other occasions. The traditional acceleration sensor is to detect the vibration of the sensitive mass, convert the vibration information into parameters such as resistance, capacitance, voltage, etc., and extract the acceleration information through the peripheral circuit. This type of sensor is difficult to apply to aerospace, oil exploration and other flammable Explosive harsh environment. Due to the characteristics of high sensitivity, large dynamic range, fast response, anti-electromagnetic interference and easy multiplexing of optical fib...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): G01P15/00
Inventor 贾平岗熊继军梁庭洪应平曹群房国成薛晨阳刘俊张文栋
Owner ZHONGBEI UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap