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Manufacturing method of micro measuring electrode, measuring method of thermoelectrical potential and related device

A technology for measuring electrodes and manufacturing methods, applied in measuring devices, measuring electrical variables, measuring current/voltage, etc., can solve the problems of sample contamination, failure to reflect the intrinsic properties of samples, and long sample preparation cycle, so as to improve reliability Effect

Active Publication Date: 2015-12-30
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Generally speaking, the steps of making micro-measurement electrodes include spin-coating photoresist on the sample, transferring the electrode pattern to the photoresist through ultraviolet or electron beam exposure and development steps, and then metal evaporation, photoresist stripping, etc. The process deposits metal electrodes on the sample. When using the above-mentioned photolithography-stripping process to make electrodes, chemical substances such as photoresist and developer may contaminate the sample itself, and the thermoelectric transport properties of the sample may change, making the measurement results It cannot reflect the intrinsic properties of the sample, and the sample preparation cycle is relatively long

Method used

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  • Manufacturing method of micro measuring electrode, measuring method of thermoelectrical potential and related device
  • Manufacturing method of micro measuring electrode, measuring method of thermoelectrical potential and related device
  • Manufacturing method of micro measuring electrode, measuring method of thermoelectrical potential and related device

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Embodiment 1

[0039] figure 1 A first embodiment of the present invention is shown.

[0040] figure 1 It is a schematic flow chart of the manufacturing method of the micro-measurement electrode provided in this embodiment. refer to figure 1 , 2 , image 3 and Figure 4 , the fabrication method of the micro measuring electrode, comprising:

[0041] Step S101, making a hollowed out mask, the hollowed out mask includes at least one heater and a hollowed out pattern of the heater terminal, and a hollowed out pattern of a first resistance thermometer and a second thermometer, and the hollowed out pattern of the thermometer includes a temperature measuring metal wire And the hollowed-out graphics of the terminals.

[0042] The hollow mask is as image 3 as shown, image 3 is a schematic diagram of the hollowed-out pattern structure of the hollowed-out mask, which is composed of image 3It can be seen that the hollowed out mask includes at least one heater 1 and the hollowed out pattern ...

Embodiment 2

[0052] This embodiment provides a measuring device for thermoelectric potential of a microscale sample. see Figure 5 and Image 6 , Figure 5 is a structural schematic diagram of a measuring device for thermoelectric potential of a microscale sample; Image 6 It is a schematic diagram of the structure of the temperature-changing sample stage in the measuring device of the thermoelectric potential of the micro-scale sample. The device for measuring the thermoelectric potential of a micro-scale sample includes: the micro-measurement electrode and the temperature-variable sample stage 4, the vacuum chamber 5, the measurement circuit, the temperature controller 6, the calibration thermometer 10 and the thermometer head 7 produced by the first embodiment. The variable temperature sample stage 4 is placed in the vacuum chamber 5. The variable temperature sample stage 4 includes a sample holder 12, a sample holder electrical terminal 11, a sample holder thermometer terminal 31, a...

Embodiment 3

[0061] Figure 8 A third embodiment of the present invention is shown.

[0062] Figure 8 It is a schematic flow chart of the method for measuring thermoelectric potential of micro-scale samples provided in the third embodiment of the present invention. This method uses the measuring device for measuring thermoelectric potential of micro-scale samples provided in the second embodiment.

[0063] see Figure 8 , 9 And 10, the measuring method of described micro-scale sample thermoelectric potential comprises:

[0064] In step S301, a calibration thermometer is fixed on the surface of the substrate on which the micro-measurement electrodes are fabricated, and the substrate is placed on the sample seat of the variable temperature sample stage.

[0065] In this embodiment, a group of T-type thermocouples is used as a calibration thermometer, and a group of T-type thermocouples are fixed with silver glue on the surface of the substrate on which micro-measurement electrodes are f...

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Abstract

The embodiment of the invention discloses a manufacturing method of a micro measuring electrode, a measuring method of thermoelectrical potential and a related device. The manufacturing method of the micro measuring electrode includes the following steps that: a hollowed mask plate is manufactured, wherein the hollowed mask plate comprises at least one heater, hollowed patterns of heater wiring ends, and hollowed patterns of a first resistance thermometer and a second thermometer, wherein the hollowed patterns of the thermometers include temperature measuring metal wires and hollowed patterns of wiring ends; a substrate carrying a micro-scale sample is aligned with and fixed to the hollowed mask plate, so that a hollowed mask plate-substrate complex can be formed; metal deposition is performed on the hollowed mask plate-substrate complex; and the hollowed mask plate is removed. With the manufacturing method of the micro measuring electrode provided by the technical schemes of the invention adopted, modification of thermoelectric transport properties of the sample, which is caused by chemical pollution generated by a photoetching-stripping process can be avoided, and therefore, the reliability of measurement of the thermoelectric transport properties of the micro-scale sample can be improved.

Description

technical field [0001] The invention relates to the field of measurement of thermoelectric materials, in particular to a method for manufacturing a micro-measurement electrode, a method for measuring thermoelectric potential and related devices. Background technique [0002] In the research process of micro-scale samples such as nanobelts or nanowires, measuring their thermoelectric transport properties (such as thermoelectric potential and electrical conductivity) is an important aspect, because the largest lateral dimension of the samples involved is generally in the range of several microns to tens of microns , in order to carry out relevant measurements, it is first necessary to fabricate micro-measurement electrodes on the sample. Generally speaking, the steps of making micro-measurement electrodes include spin-coating photoresist on the sample, transferring the electrode pattern to the photoresist through ultraviolet or electron beam exposure and development steps, and...

Claims

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Application Information

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IPC IPC(8): G01R19/00G01R3/00
Inventor 王汉夫李晓笑褚卫国金灏熊玉峰
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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