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43results about How to "Avoid changing situations" patented technology

Backlight module

The invention provides a backlight module. The backlight module comprises a back plate, a light guide plate arranged in the back plate, and a plurality of elastic bodies mounted on the back plate, wherein the back plate includes a bottom plate, and a plurality of side plates vertically connected at the periphery of the bottom plate; the light guide plate includes a bottom surface facing the bottom plate, a top surface away from the bottom plate, and a plurality of side surfaces connected between the bottom surface and the top surface; the plurality of elastic bodies are respectively mounted on the three side plates of the back plate, and butt against the three side surfaces of the light guide plate; and the contact surface between the elastic bodies and the side surfaces of the light guide plate is an arc-shaped surface or a spherical surface. The backlight module provided by the invention can ensure the mechanical strength of the light guide plate by fixing the light guide plate in the back plate through the elastic bodies between the side plates of the back plate and the light guide plate without processing the periphery of the light guide plate by grooving, embossing and so on, and can supply a certain buffer space to prevent extrusion deformation of the light guide plate due to thermal expansion in the prior art, thereby ensuring the luminous intensity and uniformity and reducing the cost.
Owner:SHENZHEN CHINA STAR OPTOELECTRONICS TECH CO LTD

Network address configuration method and system of network camera

InactiveCN103501356AAddresses issues limited to DHCP configurationImplement configurationClosed circuit television systemsTransmissionVideo monitoringIp address
The invention discloses a network address configuration method and system of a network camera and belongs to the field of intelligent monitoring. The method includes the steps that a network address allocator is connected into a network and collects and allocates network configuration information; a camera network protocol is configured, a MAC address of the network camera is obtained, and a corresponding IP address is analyzed; the IP address is sent to the network camera. The system comprises the network address allocator, a protocol configuration module and the network camera. The network address allocator is used for collecting and allocating the network configuration information, and the protocol configuration module is used for configuring a camera network protocol service terminal and a camera network protocol client terminal. The network address allocator and the network camera are in communication and interaction through a camera network protocol. With the network address configuration method and system, the aim of automatically and fast allocating a network address for the network camera is achieved, the working efficiency of constructing a network video monitoring system is greatly improved, and the problem that a current network is limited in DHCP configuration is solved.
Owner:CHINA SECURITY & FIRE TECH GRP

On-vehicle electronic control apparatus

A fourth constant-voltage power circuit (40D) directly powered from an on-vehicle battery (101) is connected, in parallel through a serial resistor (41), to a second constant-voltage power circuit (20S) powered from the on-vehicle battery through an output contact (102a) of a power relay, and is connected to a drive power terminal of a microprocessor. When the output contact is closed, the microprocessor (120A) operates with an output voltage of the second constant-voltage power circuit, and an output current of the fourth constant-voltage power circuit (40d) is limited to less than or equal to a predetermined value by the serial resistor (41). During the operation stop at which a power switch (103) is open, a micro standby current is supplied from the fourth constant-voltage power circuit (40D) to the microprocessor.
Owner:MITSUBISHI ELECTRIC CORP

Device and synchronization method for synchronous output between multichannel DDSs

InactiveCN106612151ARealize synchronous outputAvoid changing operating parametersTime-division multiplexMicrowaveCoupling
The invention relates to the field of microwaves, the particularly relates to a device and a synchronization method for synchronous output between multichannel DDSs. According to the invention, a programmable clock distribution time delay module distributes signals I / O_UPDATE and SYNC_IN and is then connected to each DDS, output signals of each DDS are connected with an A / D conversion module through a coupling network, the A / D conversion module is connected with a control module, the control module is connected with the programmable clock distribution time delay module, the control module calculates the amount of time delay according to the synchronous output time difference and completes correction through controlling the programmable clock distribution time delay module to perform different time delays on the signals I / O_UPDATE and SYNC_IN of each multichannel DDS. The device and the synchronization method enable synchronous output between the multichannel DDSs to be not limited by a condition that the working environment temperature of the multichannel DDSs must be the same, and realize synchronous output between the multichannel DDSs at different working environment temperatures.
Owner:WUHAN BINHU ELECTRONICS

Input method and device in game process

PendingCN109529344AMeet the needs of message interactionAvoid changing situationsVideo gamesUser needsUser input
The embodiment of the invention discloses an input method and device in a game process so as to intelligently recommend sentences meeting user requirements to users in the game process. The method includes the steps that in the running process of a game application, when a message sending request of a user for a current game scene is received, a first scene label corresponding to the current gamescene is determined; a plurality of sentences corresponding to the first scene label are obtained according to the corresponding relation between pre-stored scene labels and the sentences; according to a character string input by the user, candidate items are selected from the sentences corresponding to the first scene label and preferentially displayed to the user; when a selection operation of the user for a target candidate item is received, the target candidate item is sent, and the target candidate item is displayed in a game image of the game application. According to the technical scheme, the sentences corresponding to the current game scene can be intelligently pushed to the user, and the pushed sentences conform to the message interaction requirement of the user.
Owner:郑州阿帕斯科技有限公司

Walking method of pipeline robot

ActiveCN109764210ASolve the problem of not being able to turnAvoid the risk of sheddingPipe elementsManipulatorSimulationRobot
The invention belongs to the technical field of pipeline robots, and particularly relates to a walking method of a pipeline robot. The walking method of the pipeline robot includes a method of the pipeline robot fitting pipeline walls, a method of the pipeline robot walking in pipelines and a method of the pipeline robot making a turn in the pipelines. The walking method of the pipeline robot cansolve the problems that existing pipeline robots cannot cope with pipelines with special shapes, cannot change the thickness, and cannot enter thin pipelines from thick pipelines, so that the applicable size has great limitations, making a turn cannot be carried out when the pipelines with different bending degrees are handled, and the limitation of the application of the pipeline robots is caused.
Owner:桐乡市高德工程技术服务有限公司

Electromagnetic lever type water channel gate device for simulating instant dam break

ActiveCN106205347ATo achieve instant opening effectOpen fastEducational modelsWater channelDam break
The invention belongs to hydraulics experimental model facilities and particularly relates to an electromagnetic lever type water channel gate device for simulating instant dam break. The device comprises a gantry type support, a gate door sheet and an electromagnetic lifting control device. A fixing plate is arranged on the gantry type support, and a guide groove matched with a vertical guide bar on the gate door sheet is fixed to the fixing plate. The electromagnetic lifting control device comprises an electromagnetic attraction disc, an electromagnet block, and a lever hinged to a hinge head fixed to a gantry cross beam. The two ends of the lever are connected with the gate door sheet and the electromagnetic attraction disc through steel cables respectively, and through the attraction effect of the electromagnet block on the electromagnetic attraction disc, instant opening and closing of the gate door sheet are achieved through the lever. Opening and resetting can be automatically achieved, the device is suitable for water channels of multiple sizes, mechanical oscillation generated in the opening process of a gate is greatly relieved, time and labor are saved, electromagnetic control is more efficient and convenient and rapid, and errors can be effectively reduced.
Owner:ZHEJIANG UNIV

Method and device for listening data node

ActiveCN109525466AAvoid situations where target data node changes are missedAvoid changing situationsData switching networksDatabase
The present application provides a method and a device for listening a data node. The method comprises the following steps of: using a listener to listen a target data node; sending a notification request to a client registering the listener if the listener listens that the target data node changes; and retaining the listener so as to continue to listen the target data node. The method and the device can retain the listener without deleting after the listening operation; therefore, the target data node can be repeatedly listened, and the situation that the change of the target data node is missed during from the deletion of the listener to the newly-building of the listener can be avoided, so that the problem that the change of the target data node is missed during from the deletion of thelistener to the newly-building of the listener is solved. The client only needs to send a registration request to a server once, and does not need to send the registration request to the server multiple times; therefore, the number of network interactions between the client and the server can be reduced, so that the network resource is saved and the listening mechanism operation is simplified.
Owner:杭州云毅网络科技有限公司

Mapping method and device for Java class and relational database, and computing equipment

The embodiment of the invention relates to the technical field of data processing, and discloses a mapping method and a device for a Java class and a relational database and computing equipment. The method comprises the following steps: when the Java class structure is changed, annotating a newly added variable in the Java class structure according to a buried point field in a data table of the relational database so as to analyze the newly added variable and newly added data corresponding to the newly added variable into data corresponding to the buried point field based on a first Java classobject and the newly added variable corresponding to the Java class structure to obtain first intermediate layer data; wherein the first intermediate layer data comprises a buried point field, a newly added variable and newly added data; and converting the first intermediate layer data into first structured query language data, and adding the newly added variable and the newly added data to the data table according to the first structured query language data. By means of the mode, the situation that the structure of the data table is changed due to change of the Java class structure can be avoided, and therefore the updating speed of the database can be increased.
Owner:深圳数联天下智能科技有限公司

Plasma processing device, plasma processing method and storage medium

The present invention provides a plasma processing device and a plasma processing method. In the plasma processing device disposed with an impedance regulating part between the anode electrode and the processing capacitor, the impedance of the impedance regulating part can be regulated easily and properly, to inhibit abnormal discharge. The plasma processing device includes: a high frequency power source for voltage bias; an impedance regulating part; a voltage measuring part for measuring the voltage of the impedance regulating part; a band-pass filter between the impedance regulating part and the voltage measuring part; and a control part, changing the impedance value of the impedance regulating part when the plasma generates, meanwhile obtaining the voltage value measured by the voltage measuring part, according to the voltage value, calculating the current value flowing into the anode electrode, so that the current value becomes maximum or the impedance value of the impedance regulating part is set by neighbouring manners.
Owner:TOKYO ELECTRON LTD

Distribution network fault location method and system with high permeability distributed power source

The invention discloses a distribution network fault location method and system with a high permeability distributed power source. The method comprises the following steps that: S1: when a distribution network with a high permeability distributed power grid fails to work, a power grid power detection point and a distributed power supply grid-connected point detect sudden changes and collect A-phase, B-phase and C-phase currents and voltages of a current transformer and a voltage transformer at the power grid power detection point and the distributed power supply grid-connected point; S2, Thevenin equivalent processing is performed on a distributed power supply, positive-sequence, negative-sequence, zero-sequence Thevenin equivalent impedances of the distributed power supply are calculated,and thus a bus impedance matrix is established; S3, a fault indicator is constructed to identify a fault interval; and S4, a virtual bus positioning fault point is constructed. According to the invention, the distributed power supply is normalized and a model adapting to various power supplies is established; and the established bus impedance matrix is independent of the distributed power supplytype.
Owner:ANHUI ELECTRIC POWER FUYANG POWER SUPPLY +1

Real-time advertisement charging method and device, server and storage medium

The invention relates to a real-time advertisement charging method. An advertisement price string in an advertisement link URL is encrypted, and the advertisement link URL is emitted to a client; theadvertisement link URL which is sent by the client and contains a counting identification string is received, the encrypted advertisement price string in the advertisement link URL is decrypted, and an advertisement page trigger mode of the client is determined according to an agreed decryption type of the counting identifier string; a charging mode corresponding to the advertisement page triggermode is analyzed, and analyzed data is stored in a data processing framework Kafka; the advertisement link URL information stored in the data processing framework Kafka is read, and real-time chargingis completed. The method is advantaged in that the encrypted advertisement price string in the advertisement link URL is emitted to the client and is then returned to a server for decryption, information expiration is defined, a problem that an advertisement charging mode in the prior art does not fluctuate with change of the time point is solved, and the time spent on real-time charging and thepressure of a database server are reduced.
Owner:WUHAN DOUYU NETWORK TECH CO LTD

Method, system and device for confirming routing in CDMA A-Flex network

This invention provides a method and system fir determining route in CDMA A-Flex network. The method comprises: when an information distribution device receives the information of the initiated layer 3 initiated by user, selecting a CN node based on IMSI taken in the information and the corresponding relationship of IMSI and CN node stored in a data backup center, and routing the information to the selected CN node. In addition, this invention further provides a data backup center and an information distribution device. The position update in parts can be reduced through the technical proposal provided by this invention.
Owner:HUAWEI TECH CO LTD

Voice emotion recognition method and device and storage medium

The invention relates to the field of voice recognition, in particular to a voice emotion recognition method and device and a storage medium. The voice emotion recognition method comprises the following steps: comparing the frame number of original voice with a preset voice frame number; if the frame number of the original voice is smaller than the preset voice frame number, copying frames of theoriginal voice and inserting the frames into the original voice to obtain standard voice conforming to the preset voice frame number; and according to the standard voice and a preset voice emotion recognition model, recognizing the emotion corresponding to the original voice. By adoption of the embodiment of the invention, the voice emotion can be recognized under the condition of keeping the voice characteristics of the original voice, so that the accuracy of a recognition result is guaranteed.
Owner:MIGU CO LTD +1

Vehicle drive pre-warning system and method based on image monocular vision

The invention discloses a vehicle drive pre-warning system and method based on image monocular vision. The system comprises a steering wheel angle sensor, a front side camera, a rear side camera, a left side camera, a right side camera, a vehicle controller, a voice broadcasting module, a left front lamp relay, a right front lamp relay, a left rear lamp relay, a right rear lamp relay, and a vehicle power supply. The method comprises the following steps: through transmitting an automobile own turning angle measured by the steering wheel angle sensor and images collected by the cameras to the vehicle controller, processing the collected images by using a monocular sighting distance method; and according to data processed by the vehicle controller, judging whether to perform voice broadcast and open a steering lamp. The system is capable of more specifically listing multiple conditions that a vehicle opens the steering lamp, and pre-warning in time; avoiding a situation that a steering wheel angle is changed while the vehicle does not change a lane; and suitable for multiple vehicle models, convenient for operating and using, and capable of avoiding a situation that a driver forgets opening the steering lamp, and improving drive safety.
Owner:WUHAN UNIV OF TECH

Cone film thickness testing device and manufacture method thereof

ActiveCN102853797AGuarantee that the test benchmark remains unchangedSimple structureMeasurement devicesPhysicsTester device
The invention relates to a cone film thickness testing device which comprises a testing base and a probe fixing seat fixed on the testing base. The testing base comprises a testing bottom plate and a lateral supporting plate fixed on the testing bottom plate, and the probe fixing seat comprises a sleeve, a fixed ring seat and a fixing clamping ferrule. The testing bottom plate is used for placing the cone to be tested, the lateral supporting plate is used for fixing the fixed ring seat, and the fixing clamping ferrule is fixed on the fixed ring seat. The fixing clamping ferrule and the fixed ring seat are used for being matched with the sleeve which is used for fixing a probe of a film thickness testing instrument to enable the probe of the film thickness testing instrument to cling to the surface of the cone to be tested. By means of the cone film thickness testing device, the change of the testing benchmark caused by moving the probe of the film thickness testing instrument is avoided, and testing accuracy is improved. The invention further relates to a manufacture method of the cone film thickness testing device.
Owner:HUADONG PHOTOELECTRIC TECHN INST OF ANHUI PROVINCE

Data processing method and device

The invention discloses a data processing method and device. The method comprises the following steps: obtaining to-be-processed supervision data, wherein the to-be-processed supervision data comprises supervision data obtained by performing data fusion on supervision data from a plurality of data sources, and the supervision data carries an identifier of a supervised object, an attribute of the supervised object and a moment when the supervision data is updated; from pre-stored historical supervision data, retrieving a plurality of historical supervision data of which the carried attribute ofthe supervised object is matched with the to-be-processed supervision data and the updated moment is earlier than the to-be-processed supervision data; and determining the historical supervision datawith the highest credibility score in the plurality of historical supervision data, and replacing the identifier of the supervised object carried in the to-be-processed supervision data with the identifier of the supervised object carried in the historical supervision data with the highest credibility score, wherein the credibility score indicates the credibility of the supervision data.
Owner:ALIPAY (HANGZHOU) INFORMATION TECH CO LTD

Traction instrument for orthopedic surgery and operation method thereof

The invention discloses a traction instrument for orthopedic surgery and an operation method thereof, and relates to the technical field of medical instruments.The traction instrument comprises a U-shaped mounting frame, a vertical guide rod is mounted at the top of the U-shaped mounting frame, the vertical guide rod is slidably sleeved with a vertical sliding sleeve, a fastening unit is mounted on the vertical sliding sleeve, and the fastening unit is connected with the U-shaped mounting frame. And the side part of the vertical sliding sleeve is provided with a fixed sleeve through a distance adjusting unit. The traction device is reasonable in structure, when the adjusting knob is rotated, the two traction pieces can be driven to move face to face or back to back, the purpose of conducting traction on skin and flesh at an incision of a patient is achieved, through arrangement of the traction locking assembly, the positive and negative tooth lead screw can be fixed or loosened, and it is effectively avoided that in the operation process, the skin and flesh are damaged. The traction device is simple to operate and convenient to use, the number of required medical staff is reduced, the activity range of attending doctors is widened, and the operation can be carried out smoothly.
Owner:孟洪宇

Microenvironment monitoring simulator

InactiveCN110487962AThere will be no problem that the sealing of the box cannot be guaranteedEasy to carryWeather/light/corrosion resistanceRemote controlControl system
The invention provides a microenvironment monitoring simulator which is provided with a sealing box, a gas distribution and production system, a power supply system, a remote control setting out system, an online gas monitoring system, an in-box gas circulation system, a heating system and a control system. The sealing box includes an opening and a sealing door arranged in one side; the gas distribution and production system includes air valves installed in the sidewall of the sealing box, and one inlet valve is provided with an air pressure gauge; the power supply system comprises a power supply interface arranged in the sidewall of the seal box and a power supply positioned outside the seal box and connected with the power supply interface; the remote control setting out system is arranged in the seal box, and comprises an objective table mounting rack and an objective table, an automatic seal cover assembly, a signal receiver and a controller mounted on the mounting rack; the onlinegas monitoring system is arranged in the sealing box, and comprises an installation frame, air inlet and outlet mounted, opposite to each other, in the two sidewalls of the mounting frame, a gas sensor and an exhausting assembly; the in-box gas circulation system is arranged in the sealing box and used to enable uniform distribution of gas in the box; the heating system comprises a heating platemounted in the sealing box; and the control system is arranged outside the sealing box.
Owner:EAST CHINA UNIV OF SCI & TECH

Preparation for efficiently inducing chromosome doubling of winter buds of mulberries

The invention discloses a preparation for efficiently inducing chromosome doubling of winter buds of mulberries, and belongs to the technical field of chromosome doubling. The preparation for efficiently inducing chromosome doubling of winter buds of mulberries is specialized for a compound regulator for mulberry winter bud chromosome doubling and has the advantages of simplicity in manufacturing,low cost, convenience in use, higher induction efficiency and better repeatability. With application of the preparation, mulberry winter bud meristem cell differentiation can be induced, chromosome doubled mulberry twigs with high success rate can be obtained, the effect is obvious, and the preparation is suitable for popularization and application in wide mulberry breeding and cultivation in China. Double self-stirring effects can be generated on each ingredient through the self-shaking stirring effect of the self-shaking stirring cone and the similar boiling phenomenon generated when compressed inert gas in the magnetic core balloon leaks so that the uniform mixing of each raw material is accelerated, the difficulty of on-site preparation and on-site use is reduced and the preparation efficiency of on-site preparation and on-site use is effectively improved.
Owner:ZHEJIANG ACADEMY OF AGRICULTURE SCIENCES +1

Electromagnetic lever-type water tank gate device for simulating instantaneous dam failure

ActiveCN106205347BTo achieve instant opening effectOpen fastEducational modelsDam breakControl theory
The invention belongs to a hydraulic experimental model facility, in particular to an electromagnetic lever-type water tank gate device for simulating an instantaneous dam break, comprising a gantry-type bracket, a gate door plate and an electromagnetic lifting control device. The gantry type bracket is provided with a fixing plate, and the fixing plate is fixed with a guide groove matched with the vertical guide bar on the gate plate of the gate. The electromagnetic lift control device includes an electromagnetic adsorption plate, an electromagnet block and a lever hingedly connected with a hinge joint fixed on the gantry beam. The two ends of the lever are respectively connected with the gate door plate and the electromagnetic adsorption disk through the steel cable. Through the adsorption of the electromagnet block on the electromagnetic adsorption disk, the lever is used to realize the instant opening and gate entry of the gate door plate. The present invention can be automatically opened and reset, suitable for various sizes of water tanks, greatly reduces the mechanical shock during the opening process of the gate, saves time and labor, the electromagnetic control is more efficient and convenient, and can effectively reduce errors.
Owner:ZHEJIANG UNIV

Method for reducing residual vibration of ultrasonic sensor, ultrasonic chip and ultrasonic device

PendingCN114217323AShorten the compensation timeFlexibleAcoustic wave reradiationDirect controlEngineering
The invention discloses a method for reducing residual vibration of an ultrasonic sensor, an ultrasonic chip and an ultrasonic device.The method for reducing the residual vibration of the ultrasonic sensor can adopt a first scheme or a second scheme, the first scheme comprises the following steps that S1, an AD module is used for sampling amplitudes of n sampling points of the residual vibration of the ultrasonic sensor for the first time, and n is a natural number; then outputting voltage values with the same amplitude but opposite phases by using a DA module to offset and compensate the n sampling points of the first time; s2, sampling amplitudes of n sampling points for the second time by using the AD module, and then outputting voltage values with the same amplitude but opposite phases by using the DA module again to offset and compensate; s3, repeating the steps S1 and S2 until the residual vibration value is within a required range; according to the second scheme, after ADC sampling, the DAC is directly controlled to output signals with the same value but opposite phases to the ultrasonic sensor. According to the invention, the residual vibration can be obviously reduced, and the jump is obviously reduced.
Owner:COLIGEN CHINA

Message transmission method, apparatus and device, and readable storage medium

The invention discloses a message transmission method, a message transmission device, message transmission equipment and a readable storage medium, relates to the technical field of communication, and aims to solve the problem that a session source port is changed due to overtime aging and rebinding of NAT (Network Address Translation) mapping carried out on a QUIC (Query Unified Integrated Circuit) long connection session by NAT equipment. The method comprises the following steps: acquiring a first QUIC message from a QUIC client, wherein a connection identification field of the first QUIC message is used for identifying QUIC connection; according to the first QUIC message, obtaining a second QUIC message; a second QUIC message is sent to the receiving end; wherein the reserved field of the message header of the second QUIC message is used for uniquely identifying the QUIC connection, and the information in the reserved field is obtained according to the information in the connection identification field. According to the embodiment of the invention, the situation that the session source port is changed due to overtime aging and rebinding of NAT mapping carried out on the QUIC long connection session by the NAT equipment can be avoided.
Owner:CHINA MOBILE COMM LTD RES INST +1

Glue filling fixture and glue filling method for traveling wave tube electron gun

The invention discloses a glue pouring clamp of a travelling wave tube electron gun. The glue pouring clamp is an n-shaped container and further comprises a diversion container, a through hole is arranged in the side surface, which is close to the bottom end of the electron gun, of the diversion container, when the diversion container and the n-shaped container are fixedly connected, the bottom end of the diversion container maintains level with the bottom end of the n-shaped container, the height of the diversion container is greater than that of the n-shaped container, and a through hole communicating with the through hole of the diversion container is arranged in the side surface, which is close to the bottom end of the electron gun and is in contact with the diversion container, of the n-shaped container. By using the glue pouring clamp and the glue pouring method, secondary bubble discharge processing is unnecessary, and thus the labor, time and energy cost is reduced; change of the magnetic field value of a magnet ring, result from change of the temperature of the rare earth magnet ring, caused by affected heat conduction of a travelling wave tube due to silicone rubber mingled in the gap between the travelling wave tube and a base plate, is prevented; and the situation where dynamic parameters of the travelling wave tube are changed in a silicon rubber removing process is avoided.
Owner:CHENGDU GUOGUANG ELECTRIC

A method for reading data from flash memory of split-gate type double-bit storage unit

The invention provides a data reading method of a split gate type double-bit memory cell flash memory. A traditional manner of taking a current of a reference cell under a state of ''11'' as a read judgment standard is changed into a pattern of taking a current of the reference cell under a state of ''10'' multiplied by a fixed proportion as the read judgment standard, so that the sensing margin can be guaranteed and the reliability of data reading of the split gate type double-bit memory cell flash memory can be improved; yield loss caused by programming performance differences between differentlots can be avoided by means of calculating a current average value of a plurality of reference cells; further, after the split gate type double-bit memory cell flash memory is erased by block every time and before a new round of data reading is carried out, each reference cell is re-programmed, and each reference cell is reset to be the state of ''10'', so that the condition that the current value of the reference cell under the state of ''10'' is affected and changed due to the programming strongaftererasure by block can be avoided, and the reliability of data reading of the split gate type double-bit memory cell flash memory can be further improved.
Owner:SHANGHAI HUAHONG GRACE SEMICON MFG CORP

Plasma processing device and plasma processing method

The present invention provides a plasma processing device and a plasma processing method. In the plasma processing device disposed with an impedance regulating part between the anode electrode and the processing capacitor, the impedance of the impedance regulating part can be regulated easily and properly, to inhibit abnormal discharge. The plasma processing device includes: a high frequency power source for voltage bias; an impedance regulating part; a voltage measuring part for measuring the voltage of the impedance regulating part; a band-pass filter between the impedance regulating part and the voltage measuring part; and a control part, changing the impedance value of the impedance regulating part when the plasma generates, meanwhile obtaining the voltage value measured by the voltage measuring part, according to the voltage value, calculating the current value flowing into the anode electrode, so that the current value becomes maximum or the impedance value of the impedance regulating part is set by neighbouring manners.
Owner:TOKYO ELECTRON LTD
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