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Laser beam quality factor measurement method

A technology of laser beam quality and measurement method, applied in the direction of testing optical performance, etc., to achieve the effect of easy popularization, accurate measurement accuracy, and convenient operation

Active Publication Date: 2016-01-06
东莞市思恩泰克电子科技有限公司
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Problems solved by technology

[0006] The technical problem to be solved by the present invention is to provide a laser beam quality factor measurement method for the above-mentioned deficiencies in the prior art, which is easy to operate and has strong practicability. The advantage of wide measurement range solves the problem of automatic measurement of ultra-fine laser spot width

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Embodiment Construction

[0031] Such as figure 1As shown, a laser beam quality M^2 factor measurement method is characterized in that: at least one laser 1 to be measured is included, and the laser 1 divides the output light of the laser 1 into two beams through the optical unit 2, and the output light from the optical unit 2 The first beam of parallel beams is irradiated on the power detector 4-1; the second beam of parallel beams split by the optical unit 2 is irradiated on the input surface of the Moiré fringe generator composed of the scale grating 3-6 and the indicator grating 3-7. There is a photoelectric detection unit at the output end of the fringe generator, and the indicating grating 3-7 is fixed on the mechanical scanner; a knife edge 3-5 is installed on the mechanical scanner 3; the mechanical scanner drives the indicating grating 3-7 under the control of the control unit Move synchronously with the knife edge 3-5; make the edge of the knife edge 3-5 partially block the receiving light wi...

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Abstract

The invention relates to a laser beam quality factor measurement method. The method is characterized in that a guide rail slide table driven by a motor is used to realize mobile control of a measured edge; a Moire fringe range finding principle is used in measurement of laser beam quality; through a feedback current of a photoelectric cell unit, a moving distance of the edge is acquired; through a grating pair structure and a Moire fringe subdivision technology, precision measurement is performed on the moving distance of the edge; laser light spot measurement precision can optimally reach 1nm magnitude order; and simultaneously, a measurement scope of a light spot width can reach miu magnitude order. An automatic measurement problem of a very fine type laser light spot width is solved. The method possesses advantages of speediness and automation measurement. Simultaneously, a measurement result is guaranteed to possess good repeatability. By using the method, an influence of a traditional mechanical structure processing error during an automatic measurement process is avoided.

Description

technical field [0001] The invention relates to a method for measuring the quality of a laser beam, in particular to a method for measuring the quality factor of a laser beam. It is suitable for measuring the laser beam whose light intensity spatial distribution is approximately Gaussian, such as the fundamental mode Gaussian beam, or the combined mode laser beam dominated by the fundamental mode. Background technique [0002] As we all know, the beam quality is an important aspect to describe the comprehensive performance of the laser. Usually, parameters such as spot width, divergence angle, and beam quality factor are used to describe the beam quality. Smaller divergence angle and laser beam quality factor characterize a laser with good performance. Spatial alignment properties. In practice, the laser spot width is generally measured at multiple positions, and parameters such as divergence angle and laser beam quality factor are obtained through analysis and calculation....

Claims

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Application Information

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IPC IPC(8): G01M11/02
Inventor 刘海强常坤武风波汪正进
Owner 东莞市思恩泰克电子科技有限公司
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