High q value single-ended pair surface acoustic wave resonator for wireless temperature sensor

Abstract

The invention discloses a high-Q single-ended surface acoustic wave resonator applied to a wireless temperature sensor, which comprises an interdigital transducer, two reflectors respectively distributed on both sides of the interdigital transducer and The piezoelectric substrate, the interdigital transducers are arranged on the piezoelectric substrate in the form of cosine function cut finger weighting, and the two reflectors are arranged on the piezoelectric substrate in the form of grooves. The piezoelectric substrate is a quartz crystal that is cut by rotating 0° to 30° around the Y axis and propagating along the X direction. The IDT uses aluminum electrodes with a duty ratio of 1.3-1.5. The invention can realize performances such as small volume, high Q value, low loss and low parasitic, improves Q value, reduces device loss, and has strong practicability.

Description

technical field [0001] The invention relates to a surface acoustic wave resonator, in particular to a high-Q surface acoustic wave single-ended pair resonator applied to a wireless temperature sensor, and belongs to the technical field of semiconductor plane production. Background technique [0002] Surface-acoustic-wave resonator (surface-acoustic-wave), the main working principle of SAW surface acoustic wave element is to use the piezoelectric characteristics of piezoelectric materials, and use the input and output transducers (Transducer) to convert the input signal of the electric wave into mechanical energy. After processing, the mechanical energy is converted into electrical signals to achieve the goal of filtering unnecessary signals and noise and improving the quality of receiving signals; it is widely used in various wireless communication systems, televisions, video recorders and global satellites on the positioning system receiver. [0003] Its main function is t...

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Problems solved by technology

[0006] In order to solve some problems existing in the performance of single-ended surface acoustic wave resonators used in wireless temperature sensors, in order to achieve small volume, high Q value, low loss and low parasitic performance, the purpose of the present invention is to provide a A single-ended acoustic surface applied to a wireless temperature sensor that performs cosine function cutting finger weighting on an interdigital transducer, adopts a groove structure reflector, and adopts a quartz substrate that is cut around the Y axis at 0° to 35° and propagates along the X direction wave resonator

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