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Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode

A technology of rotary precision and columnar electrodes, which is applied in the direction of electrode manufacturing, processing electrodes, electric processing equipment, etc., can solve the problem of low precision of micro-electrode shape, and achieve the effects of high processing precision, uniform flow field and high rotary precision

Inactive Publication Date: 2016-02-10
SHANDONG UNIV
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  • Claims
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Problems solved by technology

However, in the actual processing process, due to the existence of secondary electrolysis, the shape accuracy of the obtained microelectrodes is not high

Method used

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  • Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode
  • Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode
  • Online electrochemical preparation device and method of high-rotation precision micro cylindrical electrode

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Embodiment Construction

[0039] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0040] like figure 1As shown, first cut a certain length (about 2.5cm) of the workpiece 3, and install it in the chuck of the electric spindle after straightening; add an appropriate amount of electrolyte 5 to the electrolyte tank 6 to ensure that the electrolyte 5 can submerge the cathode plate 4. Adjust the manual lifting table and the electrolyte tank 6 so that the workpiece electrode is immersed in the electrolyte and is located in the small hole of the cathode plate; the computer 1 controls the movement of the motor in the X and Y directions so that the workpiece electrode 3 is located in the small hole of the cathode plate Center to achieve centering; the workpiece 3 is connected to the positive pole of the DC pulse power supply, and the cathode plate 4 is connected to the negative pole of the DC pulse power supply. The computer 1 controls the ele...

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Abstract

The invention discloses an online electrochemical preparation device and an online electrochemical preparation method of a high-rotation precision micro cylindrical electrode. A cathode plate is a metal plate with a small hole and is arranged in an electrolytic bath, an electrolytic machine tool is controlled to move in x, y and z directions by a control system, so that a workpiece which is clamped in a chuck of the electrolytic machine tool is positioned in the center of the small hole of the cathode plate and is immersed into electrolytes, the workpiece is driven to rotate by an electric spindle on the electrolytic machine tool, the current of a direct-current pulse power supply is detected by a hall current sensor, a current signal is transmitted to the control system, and the voltage amplitude of the direct-current pulse power supply is dynamically and slightly adjusted by the control system according to the level of the current signal, thereby obtaining the high-rotation precision cylindrical electrode. According to the device and the method, a uniform electric field and a uniform flow field are controlled during processing, so that the high rotation precision of the processing electrode is guaranteed, and the processing stability and precision are increased; additionally, the current for controlling the processing is fed back, so that the cylindrical processing electrode is guaranteed.

Description

technical field [0001] The invention relates to an on-line electrochemical preparation device and method of a high-rotation-precision micro-column electrode. Background technique [0002] Due to its extremely high resolution, tunneling scanning electron microscopy or atomic force microscopy is widely used in the fields of surface science, material science, and biological science, and has become a key technology in nanofabrication. However, when the tunneling scanning electron microscope or the atomic force microscope is applied, it needs to use a very fine micro-probe to scan to obtain the corresponding image. Therefore, the preparation of microprobes is of great significance for the use and development of tunneling scanning electron microscopy or atomic force microscopy. In addition, in cell surgery and micro-EDM or micro-electrolytic machining, due to the small size of operation and processing, microprobes and microelectrodes with extremely small diameters (hereinafter co...

Claims

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Application Information

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IPC IPC(8): B23H3/04
CPCB23H3/04
Inventor 刘勇郭春生李名鸿
Owner SHANDONG UNIV
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