Device inducing liquid drop target to discharge and generate plasma through laser

Abstract

The invention provides a device inducing a liquid drop target to discharge and generate plasmas through laser. The device comprises a tin storage pool, a rotary disc, a tin liquid, a temperature controller, a stop screen, a rotary circular-surface screen, an electrode pair and a laser device. According to the device, the rotary disc is dipped in the tin liquid, the high speed circular centrifugal force effect is utilized to generate escaped liquid state tin, under the blocking and gating effects of the stop screen and the rotary circular-surface screen, periodic tin liquid drops are generated, through the electrode pair, under the action of the laser, extreme ultraviolet light is generated through the laser effect. The laser effect is exerted on the tin liquid drops but not on a liquid tin film on the electrode, problems of non-high work efficiency and short electrode service life existing in a traditional rotary discharge disc electrode liquid tin target supply device are solved, design precision of the device is simplified, target material supplement is convenient, and continuous work service life and stability of the device are improved.

Description

technical field [0001] The invention belongs to the field of extreme ultraviolet light source (EUV source), and more specifically relates to a laser-induced droplet tin target discharge plasma generating device in the light source of an extreme ultraviolet lithography machine. The invention utilizes the centrifugal effect of the rotating disk to realize the continuous supply of the liquid tin target at high repetition frequency, and utilizes the method of rotating the electrode to improve the service life of the electrode. Background technique [0002] At present, the extreme ultraviolet light sources in the 13.5nm band used for lithography include electron synchrotron radiation (ECR), laser plasma (LPP) and discharge plasma (DPP). Among them, DPP used the method of discharging high-temperature and high-density xenon (Xe) gas earlier, and later research found that the EUV conversion efficiency of tin (Sn) is higher than that of Xe, but tin is solid at room temperature, so th...

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Problems solved by technology

[0005] Aiming at the problems existing in the prior art, the present invention proposes a laser-induced liquid droplet tin target discharge generating plasma device, which solves the problem of discharge frequency caused by the limitation of the rotational speed of the rotating disk in the traditional rotating discharge disk electrode liquid tin target supply device. Limitation, leakage of tin liquid will pollute the discharge area, laser action on the electrode will affect the working life of the electrode, etc.

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