Two-dimensional area array ultrasonic transducer and manufacturing method thereof

Abstract

The invention provides a two-dimensional area array ultrasonic transducer and a manufacturing method thereof. The two-dimensional area array ultrasonic transducer comprises a piezoelectric array element array layer, array element electrodes, decoupling materials, backing blocks, electrode leads, a public electrode and a matching layer, wherein the piezoelectric array element array layer is formed by arranging M*N piezoelectric array elements which are divided by joints and used for receiving or transmitting ultrasonic signals, the array element electrodes are sputtered on the first surface of the piezoelectric array element array layer and cut and divided according to the joints, each array element electrode corresponds to one piezoelectric array element, the joints are filled with the decoupling materials which are used for lowering crosstalk interference of the piezoelectric array elements, the backing blocks are stuck to the array element electrodes and used for absorbing sound energy of the back faces of the piezoelectric array elements, the electrode leads are arranged on the backing blocks, the public electrode is sputtered on the second surface of the piezoelectric array element array layer, and the matching layer is stuck to the public electrode and used for achieving impedance matching between the piezoelectric array elements and external objects.

Description

technical field [0001] The invention relates to the field of preparation of ultrasonic imaging equipment, in particular to a two-dimensional surface array ultrasonic transducer and a preparation method thereof. Background technique [0002] Ultrasound transducers are key components in ultrasound equipment and can be used for ultrasound imaging, ultrasound stimulation, ultrasound therapy, and more. After the structure of the ultrasonic transducer has experienced the process of developing from a single vibration element to a linear array, a convex array, and a circular array, it is developing in the direction of a two-dimensional array. Since the birth of ultrasonic transducers, the earliest ones are single-array element ultrasonic transducers. Ultrasound images can be acquired by mechanically scanning (eg, sector scanning) a single-element ultrasound transducer. With the increasing maturity of the processing technology, the acquisition of two-dimensional ultrasonic images i...

AI Technical Summary

Problems solved by technology

[0005] 2. In the existing wiring scheme, the matching layer and the backing material must use conductive materials, which not only makes the selection space of the matching layer and the backing material very narrow, but also limits the use of ultrasonic transducers in certain environments (such as magnetic resonance environment) applications

[0006] 3. In the existing wiring scheme, the leads are connected to the matching layer and the backing, so it is necessary to separate the matching layer and the backing, because the total thickness of the matching layer, the piezoelectric layer, and the backing is relatively It is difficult to cut through the process conditions. This solution does not cut through the backing during cutting, and the slit is exposed by thinning, which not only increases the process in the process but also limits the thickness of the backing

M×N (M, N can be arbitrary values) two-dimensional surface array ultrasonic probe array requires M×N leads, and the large-scale two-dimensional lead welding process is very complicated. As the number of array elements increases and With the reduction of array element size, the difficulty of wire welding process increases sharply

And if the heat generated by the large-scale two-dimensional array cannot be dissipated, it will also have a great impact on the performance and life of the ultrasonic transducer

Images