External optical path compensation adjusting device and laser device formed thereby

Abstract

The invention provides a turning mirror adjustment-based external optical path compensation adjusting device, which comprises a turning mirror, a piezoelectric ceramic micro-displacement actuator and a rotatable base. The turning mirror is driven to rotate by changing the size of a voltage applied to the micro-displacement actuator, so that automatic compensation of an optical path is achieved. On this basis, the invention provides an external optical path compensation adjusting device-based laser device, which comprises a laser device body, the external optical path compensation adjusting device, an optical path shaping module, a focusing spherical mirror and a feedback control module, wherein the feedback control module detects an output laser and adjusts an offset light beam to a standard position by adjusting the deflection angle of the turning mirror through an optical path compensation adjusting system; the stability of laser output powers and the stability of the modes of the laser device under various duty ratios can be ensured; and the overall stability of the laser device is improved, so that efficient and stable working of a radio frequency slab laser device processing system is ensured; the processing quality of a processed device is ensured; and the processing efficiency is improved.

Description

Technical field [0001] The invention belongs to the field of laser technology, and designs and develops a high-power radio frequency slat CO 2 The laser’s turning mirror adjusts and reshapes the optical path offset compensation system. 2 The optical path deviation of the shaping system caused by the thermal distortion of the laser cavity mirror is compensated. Background technique [0002] High power slat CO 2 The laser beam quality is high, the structure is very compact and small, does not require a gas heat exchanger, the optical loss is low, the thermal stability is very high, the gas consumption is low, there is no gas flow, the cavity optics will not be polluted, and the beam quality factor M 2 Up to 1.2, representing the current CO 2 The development direction of lasers. The laser adopts an unstable-waveguide hybrid cavity design structure, and the resonant cavity is composed of an output mirror, a reflection mirror and a discharge slab waveguide. The near-field output spot ...

AI Technical Summary

Problems solved by technology

Disadvantages of this compensation adjustment method: First: the reaction time of heating is long, and the advantages of real-time adjustment are not obvious; second: heating control is difficult, which will affect the effect of compensation adjustment

This method has strong real-time performance, but the adjustment accuracy is not high. In order to obtain high-precision adjustment, it is necessary to redesign and select a new micro-displacement positioner and redesign the adjustment system.

In addition, this method does not make any corrections to the offset optical axis, and only adjusts the position of the spatial filter aperture to adapt to the misalignment of the optical path, the beam directivity will become poor, and the practicability is not strong

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