MEMS broadband piezoelectric energy collector based on PDMS film structure

Abstract

The invention provides an MEMS broadband piezoelectric energy collector based on a PDMS film structure, belonging to the technical field of a micro electro mechanical system (MEMS). The collector comprises a round frame, a PDMS film, a plurality of piezoelectric cantilever beams and a mass block, wherein the PDMS film, the plurality of the piezoelectric cantilever beams and the mass block are arrange in the round frame, the plurality of the piezoelectric cantilever beams are embedded in the PDMS film in a radial direction, one end of each piezoelectric cantilever beam is fixed on the round frame and the other end thereof is suspended; and the mass block is embedded in the PDMS film and is arranged at the center of the round frame. The invention causes piezoelectric transducing elements toobtain a larger output power under the environment of low-frequency vibration, thereby solving the problem of narrow working band of the traditional MEMS piezoelectric energy collector.

Description

technical field [0001] The invention relates to a device in the technical field of micro-electromechanical systems, in particular to a MEMS broadband piezoelectric energy harvester based on a PDMS film structure. Background technique [0002] Micro-Electro-Mechanical Systems (MEMS: Micro-Electro-Mechanical Systems) refers to a micro-device or system that can be mass-produced and integrates micro-mechanisms, micro-sensors, micro-actuators, signal processing and control circuits, and interfaces, communications and power supplies. . MEMS is developed with the development of semiconductor integrated circuit microfabrication technology and ultra-precision machining technology. In order to solve the problem that traditional batteries are large in size and short in life, and cannot meet the long-life independent energy supply requirements of new technologies such as wireless sensor networks and embedded systems, MEMS-based energy harvesting technology can convert energy harvesting...

AI Technical Summary

Problems solved by technology

[0007] Aiming at the above-mentioned deficiencies in the prior art, the present invention provides a MEMS broadband piezoelectric energy harvester based on a PDMS film structure, so that the piezoelectric transducer element can obtain a larger output power in a low-frequency vibration environment to solve the problem of traditional MEMS Narrow working frequency band of piezoelectric energy harvester

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