Method for manufacturing gecko-foot-seta-inspired biomimetic array

Abstract

The invention discloses a method for manufacturing a gecko-foot-seta-inspired biomimetic array. The method can comprise the following steps: selecting a material of which an upper layer is (100) type silicon and a lower layer is provided with a self-etching stopping layer to serve as a substrate; depositing an etching resistant layer on the surface of the upper silicon layer and patterning the etching resistant layer to form an etching resistant mask; corroding an exposed silicon structure through a silicon anisotropic etching method to form a strip with a trapezoidal cross section; removing the remaining etching resistant mask to expose the silicon structure; coating the silicon structure with a photoresist through a photoresist spraying process or a thick photoresist spin-coating method, and performing photoetching; depositing a seta structure with metal or other materials, and peeling the residual photoresist; and lastly, releasing sacrificial layer silicon through silicon isotropic etching to form the gecko-foot-seta-inspired biomimetic structural array. The method is simple in process, high in yield and suitable for large-scale manufacturing. The manufactured gecko-foot-seta-inspired biomimetic array has the advantages of long service life, high structural strength and the like, and has a wide application prospect in the fields of gecko foot form bionics, and the like.

Description

technical field [0001] The invention particularly relates to a processing method of a bionic gecko foot bristle structure array, which belongs to the field of micro-processing technology. Background of the invention [0002] The excellent physiological functions of many animals have attracted the attention of scientists from all walks of life for centuries. Mosquitoes, for example, can easily adhere to human skin to bite; jumping spiders and geckos have plantar bristles that allow them to bite on walls and ceilings. Among them, the kung fu on the gecko's feet is particularly amazing. Whether it is in the air environment, in the water or in a vacuum environment, the adhesion on its feet will not fail. Geckos rely on their magical four legs to stick tightly when they are still, and to detach easily when they move. It is characterized by the seta structure, and the difference in the seta group structure (architecture) leads to many studies on the seta of the gecko's feet and...

AI Technical Summary

Problems solved by technology

[0004] The main purpose of the present invention is to provide a method for making the bionic gecko foot setae array, to overcome the short life, low strength, Problems that cannot be mass-produced

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