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Thin film transistor array substrate and manufacturing method therefor, and liquid crystal display panel

A technology of thin-film transistors and array substrates, applied in the fields of thin-film transistor array substrates and their manufacturing methods, and liquid crystal panels, can solve the problems of limiting the application of IGZO and high preparation costs, and achieve the effects of reducing manufacturing costs and expanding applications

Active Publication Date: 2016-04-27
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, due to the addition of a photomask, the preparation cost of this structure is high, which limits the application of IGZO

Method used

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  • Thin film transistor array substrate and manufacturing method therefor, and liquid crystal display panel
  • Thin film transistor array substrate and manufacturing method therefor, and liquid crystal display panel
  • Thin film transistor array substrate and manufacturing method therefor, and liquid crystal display panel

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Embodiment Construction

[0017] The present invention will be described in detail below in conjunction with the examples, and the examples are intended to explain rather than limit the technical solution of the present invention. The directional terms mentioned in the present invention, such as "up", "down", "front", "back", "left", "right", "inside", "outside", "side", etc., are for reference only The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figures, structurally similar units are denoted by the same reference numerals. In particular, for the convenience of illustration, Figure 3A-3F Presented in simplified schematic form, the number of lines has been simplified and details irrelevant to the illustration have been omitted.

[0018] In a preferred embodiment of the present invention, a thin film transistor array substrate 100 is provided, and the thin film tr...

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PUM

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Abstract

The invention discloses a thin film transistor array substrate and a manufacturing method therefor, and a liquid crystal display panel. The thin film transistor array substrate comprises a transparent substrate, and also comprises a grid electrode, a grid electrode insulating layer, a semiconductor layer, an etching stop layer, a source electrode and a drain electrode, and a pixel electrode. The thin film transistor array substrate provided by the invention adopts an MoTi electrode to replace an ITO electrode in the conventional structure, so that a PV layer and one time of photomask processing can be omitted from the manufacturing method for the thin film transistor array substrate; and therefore, the manufacturing cost is lowered, and the application of an IGZO (indium gallium zinc oxide) structure is expanded.

Description

technical field [0001] The invention relates to a thin film transistor and a manufacturing method thereof, in particular to a thin film transistor array substrate, a manufacturing method thereof and a liquid crystal panel. Background technique [0002] Liquid crystal display is currently the most widely used flat-panel display, and has gradually become a display device with high-resolution color screens widely used in various electronic devices such as mobile phones, personal digital assistants (PDAs), digital cameras, computer screens or notebook computer screens. monitor. With the development and progress of liquid crystal display technology, people put forward higher requirements on the display quality and appearance design of liquid crystal displays. [0003] The liquid crystal panel is the most important component of the liquid crystal display, which includes a vacuum-bonded thin film transistor (TFT) array substrate, a color filter (CF) substrate, a liquid crystal lay...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/12H01L21/77
CPCH01L21/77H01L27/12H01L27/1225H01L27/1259H01L2021/775
Inventor 周志超
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD