Silicon-based light modulator

Abstract

The invention provides a silicon-based light modulator. The silicon-based light modulator at least comprises a ridge waveguide, wherein the ridge waveguide comprises a flat plate part and a convex strip which is located in the middle of the flat plate part and is higher than the flat plate part; the ridge waveguide comprises first lightly-doped regions and second lightly-doped regions, and the first lightly doped regions comprise a first longitudinal lightly-doped region which is formed in the middle of the convex strip and is in the extending direction of the convex strip, and at least one first horizontal lightly-doped region which is formed on the convex strip and at the flat plate part and intersects the convex strip; the dope type of the second lightly-doped regions is different from that of the first lightly-doped regions, and the second lightly-doped regions are formed in the convex strip and the flat plate part on the outer side of the first lightly-doped regions so as to constitute horizontal and longitudinal PN junctions with the first lightly-doped regions. According to the silicon-based light modulator provided in the technical scheme, the PN junctions are formed by the multiple first horizontal lightly-doped regions and the second lightly-doped regions and are also formed by the first longitudinal lightly-doped region and the second lightly-doped regions, so that the area of depletion regions in a mode field can be increased, and the modulation efficiency of the silicon-based light modulator can be improved.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a silicon-based light modulator. Background technique [0002] Silicon-based optical modulator is one of the core devices of on-chip optical logic, optical interconnect and optical processor, which is used to convert radio frequency electrical signals into high-speed optical signals. It can form a complete functional network with lasers, detectors and other wavelength division multiplexing devices. In recent years, through a large number of technical means, silicon-based modulators have been realized on a variety of silicon-based, mixed silicon-based, and compatible silicon-based materials, including silicon-on-insulator (SOI) materials, mixed materials of SOI and III-V compounds, strained Silicon materials, etc. Among them, since the manufacturing process of the silicon-based modulator based on the plasma dispersion effect produced on the SOI material is fully compatibl...

AI Technical Summary

Problems solved by technology

[0004] However, the photoelectric modulation efficiency of silicon-based modulators in the prior art is still not very high, and corresponding technologies are needed to improve

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