A discharge ionization current detector
A technology of ionization current and detector, applied in the direction of measuring current/voltage, instruments, measuring devices, etc., can solve the problems of low dynamic range, low ionization efficiency, low minimum detection amount, etc.
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[0031] refer to figure 1 A discharge ionization current detector according to an embodiment of the present invention will be described. figure 1 It is a schematic configuration diagram of the discharge ionization current detector of this embodiment.
[0032] In the discharge ionization current detector of this embodiment, the inside of the cylindrical tube 2 made of a dielectric becomes the first gas flow path 3, and metal ( For example, ring-shaped plasma generation electrodes 4, 5, 6 made of SUS, copper, etc.). Since the wall surface of the cylindrical tube 2 exists between the electrodes 4, 5, 6 for plasma generation and the first gas flow path 3, the wall surface itself of the dielectric serves as the surface covering the electrodes 4, 5, 6 for plasma generation. The dielectric coating layer functions to perform dielectric barrier discharge. A gas supply pipe 7 is connected to the upper end of the cylindrical tube 2 , and a plasma gas serving also as a dilution gas fl...
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