Unlock instant, AI-driven research and patent intelligence for your innovation.

Drainage device capable of changing flow direction of carrier gas

A technology of carrier gas and drainage unit, which is applied in the field of crystal growth equipment, can solve the problems of overcooling, inconvenient measurement of crystal growth rate, and difficulty in forming a rotating flow field, etc., to reduce the local temperature drop, promote the nucleation and growth of impurities, Avoid local overcooling effects

Inactive Publication Date: 2016-06-15
陈鸽
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In order to overcome the problems existing in the application of the existing drainage device: the carrier gas is concentratedly blown to a certain area on the surface of the liquid silicon, and the carrier gas takes away a large amount of heat from this area, causing the local supercooling of the liquid silicon in this area and promoting the liquid state. The nucleation and growth of impurities in silicon; the carrier gas does not form a circumferentially distributed carrier gas stress on the surface of liquid silicon, and it is difficult to form a swirling flow field in liquid silicon; the field of view leading to the ingot furnace in the drainage device is completely blocked. The state of the ingot furnace cannot be observed through the drainage device through the window, which is inconvenient for the furnace operator; the crystal measuring rod cannot be inserted into the ingot furnace through the drainage device, and the crystal growth rate is inconvenient to measure; the infrared detector cannot detect the state of the silicon material in the furnace , the automatic crystal growth process cannot be carried out normally

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Drainage device capable of changing flow direction of carrier gas
  • Drainage device capable of changing flow direction of carrier gas
  • Drainage device capable of changing flow direction of carrier gas

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0047] A drainage device for changing the direction of carrier gas in the present invention, such as figure 2 , image 3 As shown, the drainage device 100 includes an air intake part 1 , a diversion part 2 and a drainage part 3 . The air intake part 1 and the diverter part 2 are fixed, and the diverter part 2 and the drainage part 3 are fixed. Both the splitter part 2 and the drainage part 3 are columnar bodies with through holes arranged along the direction of their centerlines, preferably cylinders. Such as image 3 As shown, the diversion part 2 includes a first diversion part 21 and a second diversion part 22, and the second diversion part 22 and the drainage part 3 are integrally formed to form a drainage tube. The lower end of the first splitter 21 is provided with an internal thread 211, and the upper end of the second splitter 22 is provided with an external thread 221; the internal thread 211 and the external thread 221 are matched, such as image 3 shown. The m...

Embodiment approach 2

[0054] A drainage device for changing the direction of carrier gas in the present invention, such as Figure 11 , Figure 12 As shown, the drainage device 100 includes a fixing part 10 , an air intake part 1 , a diverter part 2 and a drainage part 3 . The air intake part 1 and the diverter part 2 are fixed, the fixed part 10 and the diverter part 2 are axially fixed, and the diverter part 2 and the drainage part 3 are axially fixed. Furthermore, the fixing part 10, the diverter part 2 and the drainage part 3 are formed integrally, and are columnar bodies with through-holes arranged along the direction of their centerlines, that is, cylinders, preferably cylinders. The drainage device 100 is made of relatively low-cost graphite, preferably isostatic graphite, and may also be relatively expensive molybdenum or titanium. An internal thread 11 for fixed connection is provided on the inner wall of the fixing part 10 , and the internal thread 11 extends along the centerline of the...

Embodiment approach 3

[0060] A drainage device for changing the direction of carrier gas in the present invention, such as Figure 18 , Figure 19 As shown: the drainage device 100 includes a fastening part 10 , an air intake part 1 , a diversion part 2 , and a drainage part 3 . The drainage device 100 is made of molybdenum, and high-cost high-temperature-resistant materials such as titanium can also be used. Both the fastening part 10 and the diverter part 2 are cylindrical bodies with through-holes arranged along the direction of their centerlines, that is, cylinders, preferably cylinders. The fastening part 10 and the top of the splitter part 2 are axially fixed. Internal threads 11 along the centerline direction of the fastening portion 10 are provided on the inner sidewall of the fastening part 10, and external threads can also be provided on the outer sidewall thereof as required. The splitter 2 is a closed cavity in the shape of an annular cylinder, mainly composed of an inner wall, an ou...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention belongs to the field of polycrystalline ingot casting equipment, and particularly discloses a drainage device capable of changing the flow direction of carrier gas. The drainage device comprises a gas inlet part, a distribution part and a drainage part which are sequentially and fixedly connected. A gas inlet hole for the carrier gas to flow in is formed in the gas inlet part. A distribution cavity is formed in the distribution part, the drainage part is composed of at least one drainage gas channel used for changing the flow direction of the carrier gas, the gas inlet hole and the distribution cavity are communicated, gas inlets of the drainage gas channels and the distribution cavity are communicated, and gas outlets are distributed in the same angular direction along the circumference. A view field leading to the interior of an ingot furnace is provided by the drainage device, and the carrier gas is dispersedly blown and jetted to different zones of the surface of liquid silicon through the drainage device, so that the contact area of the carrier gas and the liquid silicon is increased, and local supercooling caused by the carrier gas and impurity formation intensified by the carrier gas are reduced; a rotating flow field is formed in the liquid silicon under driving of the carrier gas, impurity volatilization is promoted under the combined action of a natural convection flow field and the rotating flow field, local impurity enrichment in the liquid silicon is reduced, and thus distribution of the radial resistivity of crystals is more uniform.

Description

technical field [0001] The invention relates to a drainage device, in particular to a drainage device for changing the flow direction of a carrier gas used in a polycrystalline ingot furnace, and belongs to the field of crystal growth equipment. Background technique [0002] The polycrystalline ingot furnace 10 is mainly composed of an infrared detector 16, a furnace body 11, a drainage device 12, a heat insulation cage 13, a heater 14, and a graphite platform 15, such as figure 1 shown. The drainage device 12 includes a graphite tube 123 , a fitting nut 121 and a flow guide tube 122 . The upper end of the guide tube 122 is provided with an external thread that matches the internal thread of the fitting nut 121, and the upper end of the guide tube 122 passes through the through hole in the middle of the top insulation board of the heat insulation cage, and the matching hole above the top insulation board. The connecting nut 121 is fixed, and the lower end of the draft tube...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): C30B28/06C30B29/06
CPCC30B28/06C30B29/06
Inventor 陈鸽其他发明人请求不公开姓名
Owner 陈鸽