Vacuum and leakage rate multifunctional calibrating device
A calibration device and multi-functional technology, which is applied in the field of vacuum and leak rate multi-function calibration devices, can solve the problems of damaged detection pipelines for calibration, cracked tube walls, and low calibration accuracy, so as to reduce the difficulty of assembly and improve heat dissipation and cooling The effect of action
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Embodiment 1
[0036] Such as Figure 1-10 As shown, the vacuum and leak rate multifunctional calibration device of the present invention includes a vacuum and leak rate multifunctional calibration device verification platform 300, a vacuum and leak rate multifunctional calibration device control box 400, a control system and a vacuum and leak rate multifunctional calibration system 200.
[0037] Among them, such as Figure 3-7 As shown, the verification platform 300 of the vacuum and leak rate multifunctional calibration device includes a mounting frame 301, an upper panel 302, a side panel and an upper panel 314; the upper panel 302 is provided with a pipeline installation hole and a positioning screw hole 311; The side panel includes a side case cover 304 and a side case cover mounting plate 303, the side case cover mounting plate 303 is provided with a side case cover installation groove 306, and the bottom of the side case cover installation groove 306 is provided with a side case cove...
Embodiment 2
[0057] Such as Figure 2-11As shown, the vacuum and leak rate multifunctional calibration device includes a vacuum and leak rate multifunctional calibration device verification platform 300, a vacuum and leak rate multifunctional calibration device control box 400, a control system and a vacuum and leak rate multifunctional calibration system 200;
[0058] The verification platform 300 of the vacuum and leak rate multifunctional calibration device includes a mounting frame 301, an upper panel 302, a side panel and an upper panel 314; the upper panel 302 is provided with a pipeline installation hole and a positioning screw hole 311; the side The panel includes a side case cover 304 and a side case cover installation plate 303, the side case cover installation plate 303 is provided with a side case cover installation groove 306, and the bottom of the side case cover installation groove 306 is provided with a side case cover installation hole 307, The side case cover mounting hol...
Embodiment 3
[0160] The difference between this embodiment and Embodiment 2 is that a sealing structure is provided between the air guide tube connected to the vacuum chamber 216 and the low vacuum chamber 227 and the chamber wall, such as Figure 12-14 As shown, the sealing structure includes a first sealing member 503, sealing grease and a sealing member installation groove 502 provided on the chamber wall 501, and the opening direction of the sealing member installation groove 502 faces the vacuum chamber 216 and the low vacuum chamber 216. Outside the chamber 227, the opening area of the seal installation groove 502 is smaller than the groove bottom area of the seal installation groove 502 and the projection of the opening of the seal installation groove 502 is located at the center of the seal installation groove 502 bottom, The first seal 503 is a cylindrical rubber seal, the side wall and bottom wall of the cylindrical rubber seal are both hollow structures 506, and the hollow st...
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