On-chip integrated arsenic sulfide microdisk cavity and method for manufacturing same

A technology for integrating arsenic sulfide microdisk cavity and microdisk cavity, applied in the optical field, can solve the problem of low quality factor of integrated arsenic sulfide microdisk cavity, and achieve the effect of improving quality factor and improving performance

Active Publication Date: 2016-07-06
NANJING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Embodiments of the present invention provide an on-chip integrated arsenic sulfide microdisk cavity and a manufacturing method

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  • On-chip integrated arsenic sulfide microdisk cavity and method for manufacturing same
  • On-chip integrated arsenic sulfide microdisk cavity and method for manufacturing same
  • On-chip integrated arsenic sulfide microdisk cavity and method for manufacturing same

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Embodiment Construction

[0050] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only parts related to the present invention are shown in the drawings but not all content.

[0051] figure 1 It is a schematic cross-sectional view of an implementation of an on-chip arsenic sulfide microdisk cavity provided by an embodiment of the present invention. Such as figure 1 As shown, the on-chip integrated arsenic sulfide microdisk cavity provided by the embodiment of the present invention includes: a support structure 101 and a microdisk 102 .

[0052] Wherein, the microdisk 102 is located on the support structure 101 , and the size of the microdisk 102 is larger than that of the support structure 101 . ...

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Abstract

An embodiment of the present invention discloses an on-chip integrated arsenic sulfide microdisk cavity and a method for manufacturing the same. The microdisk cavity includes: a microdisk and a supporting structure stacked from top to bottom; wherein the size of the microdisk is greater than that of the supporting structure. According to the on-chip integrated arsenic sulfide microdisk cavity and the method for manufacturing the same provided in the embodiment of the present invention, the quality factors of the on-chip integrated arsenic sulfide microdisk cavity can be increased.

Description

technical field [0001] The embodiments of the present invention relate to the field of optical technology, in particular to an on-chip integrated arsenic sulfide microdisk cavity and a manufacturing method thereof. Background technique [0002] Whispering gallery mode microdisk cavity is an important micro-nanophotonic device, which has a wide range of applications in low-threshold lasers, cavity optomechanics, and biosensing. Especially in the field of integrated optics, due to the huge potential application value of mid-infrared optics and nonlinear optics, the research on integrated optics based on materials with high nonlinear coefficient of mid-infrared light transmission will be of great help to this direction. [0003] At present, the mainstream of research on mid-infrared light-transmitting materials in integrated optics is chalcogenide glass, among which arsenic sulfide and arsenic selenide are the main ones. The existing techniques for preparing arsenic sulfide mi...

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Application Information

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IPC IPC(8): B81B1/00B81C1/00
CPCB81B1/00B81C1/00523
Inventor 姜校顺陈远赵明霄肖敏
Owner NANJING UNIV
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