Early warning system for monitoring transmission electron microscope

Abstract

The invention discloses an early warning system for monitoring a transmission electron microscope, belonging to the technical field of an electron microscope. The system comprises a monitoring computer, a pressure sensor group, a current sensor group, a grating encoder and a stepping motor encoder, wherein the pressure sensor group, the current sensor group, the grating encoder and the stepping motor encoder are used for sending detection data to the monitoring computer, the monitoring computer is used for sending data exceeding a threshold range to an electronic microscope computer and sending a starting instruction to an alarm when at least one of a key parameter and main accessory parameters of an electronic microscope exceeds the threshold range of the data, and the alarm gives out sound-light alarm. By the system, the utilization of a device is greatly improved, the problem occurring in the electronic microscope device can be timely found out and timely solved, the damage to the device or mislead to a scientific experimental result caused by delay finding of the problem can be prevented to a great extent, and meanwhile, the device cost is reduced.

Description

technical field [0001] The invention discloses an early warning system for monitoring a transmission electron microscope, which belongs to the technical field of the electron microscope. Background technique [0002] Electron microscope is one of the basic technical means for the microscopic study of materials, and it is also the most important detection equipment for nanomaterials. Since the mid-1960s, the appearance of the scanning electron microscope (SEM) has made a qualitative leap in the ability of human beings to observe tiny substances. Due to the high resolution, good depth of field and easy operation of the scanning electron microscope, it has quickly become a An indispensable tool and widely used in scientific research and engineering practice. On the basis of ordinary optical microscopy, electron microscopy has further broadened people's observation horizons, played an important role in various fields, and has been widely used in the field of science. In the fie...

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Problems solved by technology

[0005] The technical problem to be solved by the present invention is to provide an early warning system for monitoring the transmission electron microscope, which detects the key parameters of the electron microscope vacuum system, high voltage system, and filament system in real time, and uploads the key parameters when the key parameters exceed the threshold range. Exceeding the standard data and starting the sound and light alarm, which solves the technical problem of the lack of electron microscope early warning system in the laboratory

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