Manufacturing template for multichannel quartz crystal microbalance chip

Abstract

The invention relates to a manufacturing template for a multichannel quartz crystal microbalance chip. The manufacturing template comprises an electrode processing part, wherein the electrode processing part is composed of a common electrode processing plate and a function electrode processing plate detachably fixed on the common electrode processing plate; at least one common electrode hole used for processing a common electrode is formed in the common electrode processing plate; at least two function electrode holes used for processing a functional electrode are formed in an area corresponding to each common electrode hole; a chip fixing plate is arranged between the common electrode processing plate and the function electrode processing plate; a chip fixing through hole is formed in the chip fixing plate, is used for fixing a chip between two electrode processing plates and covers each common electrode hole; a shielding part for shielding local function electrode holes is also arranged on the upper part of the function electrode processing plate. The template can be used for processing reverse mesa structures in different depths on a quartz crystal wafer at one time according to an ion etching method, so as to manufacture the multichannel quartz crystal microbalance chip.

Description

technical field [0001] The invention relates to a manufacturing template for a multi-channel quartz crystal microbalance chip, which belongs to the field of microprocessing of quartz crystal microbalances. Background technique [0002] Quartz Crystal Microbanlance (QCM) is a kind of acoustic wave thickness shear mode sensor, which is composed of a quartz crystal plate with piezoelectric effect and paired electrodes. According to the characteristics of external physical loads, QCM is divided into two categories: gravimetric loads and viscoelastic loads. The weight load is the attachment deposited on the electrode surface, which causes the change of the QCM resonance frequency, and is mainly used in the thickness monitoring of the physical evaporation deposition process; the viscoelastic load is the load generated by the QCM in the viscoelastic medium environment, and the viscosity and density of the liquid cause Resonant frequency changes, which are mainly used in biological...

AI Technical Summary

Problems solved by technology

Manufacturing MQCM by chemical etching has the following disadvantages: 1) The process is complicated; 2) HF is highly toxic and dangerous to operate; 3) Since HF will react with the quartz wafer in contact, the resulting concave hole size is irregular; 4) Coating Photoresist and metal film are easy to cause wafer contamination

But at present, this method is mainly used to make a single anti-mesa structure QCM, and has not been extended to the production of MQCM.

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