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Processing method for establishing anticorrosion system in acidic silica sol

A technology of acidic silica sol and treatment method, which is applied in the direction of chemical instruments and methods, silicon compounds, polishing compositions containing abrasives, etc., can solve the problems of easy deterioration, achieve low cost, prevent deterioration, and solve the problem of easy odor Effect

Inactive Publication Date: 2016-08-03
JIANGSU TIANHENG NANO SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of the present invention is to solve the perishable problem of existing acidic silica sol products, and provide a treatment method for establishing an anti-corrosion system in acidic silica sol, which improves the influence of the deterioration of silica sol on the characteristics of the colloid itself, and can effectively Inhibit the occurrence of odor, mildew and gradual blackening of the colloidal sol, and maintain the basic physical properties of the silica sol during the shelf life

Method used

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  • Processing method for establishing anticorrosion system in acidic silica sol
  • Processing method for establishing anticorrosion system in acidic silica sol
  • Processing method for establishing anticorrosion system in acidic silica sol

Examples

Experimental program
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Effect test

Embodiment 1

[0022] Prepare 1 kg of polishing solution from the deteriorated acidic silica sol.

[0023] This 1 kg of polishing solution was heated to 65° C., kept stirring during the heating process, and cooled to room temperature after heating, and methylisothiazolinone (MIT) was used as a bactericide.

[0024] Two treatments are available:

[0025] 1. One-time treatment: process the cooled polishing solution in the process of continuous stirring, take the antiseptic and bactericide, add the antiseptic and bactericide to the polishing solution with stirring, and the quality of the added antiseptic and bactericide is in the system 0.3% of the total mass of the solution, the stirring time is 10 minutes, and the treatment is completed after the stirring is completed.

[0026] Experimental effect analysis: The silica sol after the above treatment has no change in its pH value, specific gravity, viscosity and other parameters, and the treated silica sol is used to prepare polishing liquid, a...

Embodiment 2

[0034] Prepare 1 kg of polishing solution from the deteriorated acidic silica sol.

[0035] Heat this 1 kg of polishing solution to 80° C., keep stirring during the heating process, cool to room temperature after heating, and select dichlorophen bactericide for use.

[0036] Two treatments are available:

[0037] 1. One-time treatment: process the cooled polishing solution in the process of continuous stirring, take the antiseptic and bactericide, add the antiseptic and bactericide to the polishing solution with stirring, and the quality of the added antiseptic and bactericide is in the system 0.5% of the total mass of the solution, the stirring time is 6 minutes, after the stirring is completed, the treatment is completed.

[0038] Experimental effect analysis: The silica sol after the above treatment has no change in its pH value, specific gravity, viscosity and other parameters, and the treated silica sol is used to prepare polishing liquid, and the silica sol is processed...

Embodiment 3

[0046] Prepare 1 kg of polishing solution from the deteriorated acidic silica sol.

[0047] Heat this 1 kg of polishing solution to 80° C., keep stirring during the heating process, cool to room temperature after heating, and select benzalkonium chloride as the bactericide.

[0048] Two treatments are available:

[0049] 1. One-time treatment: process the cooled polishing solution in the process of continuous stirring, take the antiseptic and bactericide, add the antiseptic and bactericide to the polishing solution with stirring, and the quality of the added antiseptic and bactericide is in the system 0.01% of the total mass of the solution, the stirring time is 3 minutes, and the treatment is completed after the stirring is completed.

[0050] Experimental effect analysis: The silica sol after the above treatment has no change in its pH value, specific gravity, viscosity and other parameters, and the treated silica sol is used to prepare polishing liquid, and the silica sol ...

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Abstract

The invention provides a treatment method for establishing an antiseptic system in acidic silica sol, which includes the following steps: 1) heating the acidic silica sol, stirring continuously during the heating process, and cooling to room temperature after heating; 2) adding antiseptic and bactericide Add it to the cooled acidic silica sol in step 1) to establish an antiseptic system for the acidic silica sol; in the step 1) described above, the heating temperature is controlled at 50-90°C; The method of adding is single-step processing or multi-step processing. The advantage of the present invention is that the use of scientific and reasonable anti-corrosion treatment process, according to the nature of the system, with different bactericidal mechanisms, can effectively inhibit the colloid itself from odor and mildew, and ensure the pH value, specific gravity, viscosity and other parameters of the silica sol , while not affecting the parameters of the prepared polishing solution.

Description

technical field [0001] The invention relates to an acidic silica sol anticorrosion method and treatment process, which does not affect various parameters of the system and the polishing effect of the prepared polishing liquid after treatment, and is a practical, simple, convenient, time-saving and labor-saving treatment method. Background technique [0002] Acidic silica sol is a colloidal solution formed by the uniform diffusion of silica particles in water. The general pH value is 2-4. It has many excellent properties and characteristics. As a fine chemical product, it is widely used in chemical industry, materials, textiles, electronics, etc. and other industries. For the electronics industry, silica sol is a polishing material for CMP technology with excellent performance. It can be used for rough polishing and fine polishing of silicon wafers, as well as IC processing, and is especially suitable for large-scale integrated circuit multilayer thin films. Planarization pr...

Claims

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Application Information

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IPC IPC(8): C01B33/146C09G1/02C09K3/14
CPCC01B33/146C09G1/02C09K3/1454
Inventor 李薇薇李家荣
Owner JIANGSU TIANHENG NANO SCI & TECH
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