Method and device for dynamic gas mixing and filling under pressure within wide range
A dynamic gas distribution and wide-area technology, which is applied to the installation device of container structure, container filling method, container discharge method, etc., can solve the problems of large volume, cumbersome operation, and low accuracy of the gas distribution instrument, so as to improve calibration Excellent test efficiency, gas distribution efficiency and high accuracy
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[0018] The content of the present invention will be further described in detail through the following examples. exist figure 1 In the example shown: SF 6 The output end of gas cylinder 1 is connected to standard gas cylinder 3 through the main gas circuit, and the main gas circuit is connected to SF 6 The output end of the gas cylinder 1 is provided with a pressure reducing valve 5, a solenoid valve 6, a first mass flow controller 7, a first static mixer 8, a second mass flow controller 9, a second static mixer 10, The third mass flow controller 11, the third static mixer 12, the buffer tank 13, the electromagnetic proportional regulating valve 14 and the diaphragm press 15, the output terminal of the diaphragm press 15 is connected to the standard gas cylinder 3, SF 6 The output end of the gas cylinder 1 is also connected to the main gas circuit between the second mass flow controller 9 and the second static mixer 10 through the electromagnetic valve 6 on the main gas circu...
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