A light-emitting enhanced electron beam pumped ultraviolet light source and its preparation method
A technology of ultraviolet light source and electron beam, applied in the direction of excitation method/device, circuit, laser, etc., can solve the problem of low light output power, achieve the effect of uniformity, low cost, and enhanced reflection
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0033] The present invention will be further elaborated below through specific embodiments in conjunction with the accompanying drawings.
[0034] Such as figure 1 As shown, the light-exiting enhanced electron beam pumped ultraviolet light source of this embodiment includes: a substrate 1, an epitaxial layer 2, a grid-shaped reflective layer 3, an electron beam pumping source 4, and a light-exiting window 5; wherein, the back side of the epitaxial layer Formed on the substrate 1, the epitaxial layer includes template material 21, buffer layer 22 and multiple quantum wells 23 sequentially from the back to the front, such as figure 2 As shown; Periodic grid-like scratches 31 are engraved on the front of the epitaxial layer 2, and the scratches go deep into the substrate 1; a uniform high-reflection metal film is evaporated on the unscratched surface and the scratched surface, A grid-like reflective layer 3 is formed, with a concave surface 32 at the scratch; a light exit windo...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 


