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A glow discharge jet plasma generation structure

A technology of jet plasma and glow discharge, which is applied in the direction of plasma and electrical components, can solve the problems of unsafe discharge of electrodes, unevenness, difficult glow discharge of jet plasma, etc., to reduce the initial discharge voltage, The effect of widespread application promotion

Active Publication Date: 2018-08-14
BEIJING JIAOTONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0016] In view of the above problems, the present invention proposes a generation structure for generating low-temperature jet plasma under atmospheric pressure, especially glow discharge jet plasma, aiming at solving the problem that it is difficult to use non-inert gas under atmospheric pressure to generate large aperture and large Technical Difficulties of Area Glow Discharge Jet Plasma
[0017] In addition, all discharge electrodes of the present invention are located inside a good insulating medium, and the jet plasma generated belongs to the category of glow discharge, which can effectively solve the problems of unsafe electrodes and uneven discharge existing in existing plasma jet devices

Method used

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  • A glow discharge jet plasma generation structure
  • A glow discharge jet plasma generation structure
  • A glow discharge jet plasma generation structure

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Experimental program
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Effect test

Embodiment 1

[0041] image 3 It is a structural schematic diagram of Embodiment 1 of the present invention; Figure 4 It is a cross-sectional view of Embodiment 1 of the present invention; Figure 4 The air ducts, high-voltage terminals and grounding terminals that accommodate the communication with the external working gas pipelines are omitted, such as image 3 , Figure 4 As shown, a glow discharge jet plasma generating structure of the present invention includes an insulating medium 101, and the insulating medium 101 is provided with a through hole 104 for accommodating the passage of the working gas, and the through hole 104 contains the air communicated with the external working gas pipeline pipeline 111. The outside of the through hole 104 is symmetrically provided with a grounding electrode 103, and the grounding electrode 103 is connected to the working power supply through the grounding terminal 113; it also includes a high voltage electrode 102 connected to the working power ...

Embodiment 2

[0051] Such as Figure 6 as shown, Figure 6 The air pipe, the high-voltage terminal and the grounding terminal that accommodate the external working gas pipeline are omitted in the figure. The rest of the structure of this embodiment is the same as that of Embodiment 1, the difference is that more than two through holes 104 are uniformly arranged. There are four cloths, the through hole 104 is a round hole, the high voltage electrode 102 crosses the through hole 104 and crosses the cross section of the through hole 104, and the part of the high voltage electrode 102 located in the through hole 104 is between the ground electrodes 103 outside the through hole;

[0052] The working process is the same as that of Embodiment 1, and will not be repeated here.

Embodiment 3

[0054] Such as Figure 7 as shown, Figure 7 The air pipe, the high-voltage terminal and the ground terminal that accommodate the external working gas pipeline are omitted. The rest of the structure of this embodiment is the same as that of Embodiment 1, the difference is that the through hole 104 is an irregular shape, and the working process is the same as that of Embodiment 1. Same, no more details here.

[0055] In addition, the ground electrode 103 is located around the through hole 104, and the shape of the ground electrode 103 is a sheet shape, a cylinder shape or an irregular shape (such as Figure 8 , Figure 9 shown), the material is tungsten, copper, aluminum or stainless steel with good electrical conductivity or carbon fiber.

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Abstract

The invention discloses a glow discharge jet plasma generating structure which comprises an insulating medium. The insulating medium is provided with a through hole, wherein a work gas passes through the through hole. Grounding electrodes are symmetrically arranged on the outer side of the through hole. The grounding electrodes are connected with a work power supply through grounding wiring terminals. The structure further comprises a high voltage electrode which is connected with the work power supply through a high voltage wiring terminal. The high voltage electrode crosses the through hole, and the high voltage electrode and the cross section of the through hole are crossed. A part, which is located in the through hole, of the high voltage electrode is located between the grounding electrodes outside the through hole. The work gas is led in through the through hole and carries out glow discharge under the action of the strong electric field in the through hole. Generated plasma is jet at the outlet of the through hole to form jet plasma. According to the invention, under the same technical condition, the homogeneous non-inert gas glow discharge jet plasma is generated; active particles in plasma are fully utilized; and the glow discharge jet plasma generating structure is extensively applied and promoted in the application of material processing and biomedicine.

Description

technical field [0001] The invention belongs to the technical field of gas discharge plasma generation, and more particularly relates to a structure for generating low-temperature jet plasma, especially glow discharge jet plasma, under atmospheric pressure. Background technique [0002] Compared with the traditional gas discharge plasma, the biggest advantage of the atmospheric pressure low-temperature jet plasma is that the plasma is ejected out of the discharge area, and the operator does not need to touch the high-voltage electrode, which greatly improves the safety of use. In addition, the generation device of atmospheric pressure low-temperature jet plasma gets rid of the expensive vacuum system, and the Joule heating of this type of jet plasma is low, and almost all the electric energy is used for the excitation of particle activity in the plasma. Under certain conditions (such as The high-voltage electrode is connected with the external sinusoidal high-voltage voltage...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H05H1/26
CPCH05H1/26
Inventor 刘文正杨晓马传龙
Owner BEIJING JIAOTONG UNIV