Unlock instant, AI-driven research and patent intelligence for your innovation.

Anti-static exposure machine system and manufacturing method thereof

An exposure machine and anti-static technology, which is applied in the direction of photomechanical equipment, microlithography exposure equipment, photolithography exposure equipment, etc., can solve problems such as damage, product yield decline, and cost of consumables

Active Publication Date: 2019-03-19
深圳市鼎华芯泰科技有限公司
View PDF10 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The operation of degassing will also cause film misalignment, deformation and damage to the Mylar film; if the degassing is not clean, the product yield will drop
In order to solve the above problems, the traditional solution is not only to make air holes on the film, but also to use auxiliary air guide strips, electrostatic reels to remove dust, etc. It also needs to have a process of catching air, the operation efficiency is low, and the cost of other consumables will also be incurred.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Anti-static exposure machine system and manufacturing method thereof
  • Anti-static exposure machine system and manufacturing method thereof
  • Anti-static exposure machine system and manufacturing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0014] 1. Select the conductive material for the Mylar film used in the exposure frame, or use an antistatic agent to coat the Mylar film, so that the surface of the Mylar film must have conductivity;

[0015] 2. The surface of the film substrate can be coated with an antistatic agent, so that the surface of the film substrate has the ability to conduct electricity;

[0016] 3. The protective film attached to the film surface must use conductive materials;

[0017] 4. If the photosensitive material used is a dry film, then the polyester protective film on the surface of the dry film can use conductive materials;

[0018] 5. The exposure frame is designed with a conductive channel, which must be able to release and ground the static electricity generated on the exposure table through the conductive Mylar film, exposure frame, exposure body and grounding device without gathering on the exposure table.

[0019] Implementation Rules:

[0020] A. The surface of the Mylar film nee...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses an anti-static exposure machine system. Mylar films with conductive capacity are applied to upper and lower frames of an exposure machine; a conductive channel is designed on a machine body; the generated static electricity can be released through the channel in a grounding form; in an exposure process, the exposure platform, the mylar films and the films are prevented from rubbing and generating static electricity; the problems of short circuit caused by electrostatic adsorption dust and poor vacuumizing effect caused by static electricity are eliminated.

Description

technical field [0001] The invention relates to exposure machine equipment, in particular to an antistatic exposure machine and a manufacturing method. Background technique [0002] In the traditional exposure machine system, the Mylar film, glass loaded on the exposure frame, the film tool used and its protective film are all non-conductive materials. According to the principle of static electricity, rubbing two non-conductive objects will generate a large amount of static electricity. Non-conductive objects are also excellent materials for retaining charges. Therefore, during the exposure operation, the glass, Mylar, and film on the exposure table will generate and retain a large amount of static electricity, absorbing dust particles floating in the operating environment, resulting in open and short circuits, gaps, and other scrapped products. [0003] In the traditional exposure machine, in order to ensure a tight vacuum (the non-conductive interface repels each other d...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
CPCG03F7/70908
Inventor 何忠亮朱争鸣叶文
Owner 深圳市鼎华芯泰科技有限公司