A device for guiding microfluidic transport by exciting-absorbing traveling waves

A technology of microfluidics and traveling waves, which is applied in the direction of liquid displacement machinery, pumps with flexible working elements, machines/engines, etc., and can solve the problem of comparison of physical and chemical properties of fluids and pipe wall materials that are only applicable to a certain range Sensitivity and other issues, to achieve the effects of improving thermal diffusion efficiency, high integration, and simple control methods

Inactive Publication Date: 2018-01-19
JILIN UNIV
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Problems solved by technology

But there are also certain limitations. It is sensitive to the physical and chemical properties of the pipe wall material and the driven fluid, so it can only be applied to a certain range of fluids and pipe wall materials; Free charges are induced in the neutral or fluid-solid interface, and the microfluidics are driven by the driving force generated by the interaction of the electric field and the free charges

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  • A device for guiding microfluidic transport by exciting-absorbing traveling waves
  • A device for guiding microfluidic transport by exciting-absorbing traveling waves
  • A device for guiding microfluidic transport by exciting-absorbing traveling waves

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Embodiment approach

[0024] The core part of the present invention is the processing and manufacture of ultrasonic traveling wave-driven micro-device 100, wherein the core concept of the present invention is to bond PZT-4 sheet 1 and PZT-4 thin-sheet 2 on ultrasonic traveling-wave driven micro-device 100 to make it produce Ultrasonic traveling waves with one-way linear propagation can be realized through the following technical solutions:

[0025] 1), silicon wafer cleaning

[0026] Firstly, the second silicon wafer 5 is cleaned. The purpose of the cleaning treatment is to make the surface of the second silicon wafer 5 clean and dry so as to be closely combined with the subsequent process.

[0027] 2), Si 3 N 4 film production

[0028] This device uses Si 3 N 4 As the required film material. In this ultrasonic traveling wave driven micro-device 100, low-pressure chemical vapor deposition (LPCVD) is used to perform low-stress Si on the second silicon wafer 5 in an LPCVD furnace. 3 N 4Growt...

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Abstract

The invention relates to a vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device and belongs to the field of micro-precision drive. The vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device comprises an ultrasonic wave signal generator, an ultrasonic traveling wave drive microcomponent, an inductor and a resistor. According to the vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device, high-frequency vibration is generated through the inverse piezoelectric effect of piezoelectric ceramics, an ultrasonic traveling wave sound field is generated in a micro-pipeline through a vibration excitation and vibration adsorption principle, acoustic radiation pressure in the sound field can drive microfluid in the micro-pipeline to be delivered in the traveling wave direction, point drive of traditional microfluid drive is changed into face drive, and the whole sound field is a drive source. The vibration-excitation-vibration-adsorption traveling wave guide microfluid delivery device has the beneficial effects that no movable component exits, the control manner is simple, control precision is high, and high miniaturization and high integration are achieved.

Description

technical field [0001] The invention relates to a device for guiding micro-fluid transportation by exciting-absorbing traveling waves, which belongs to the field of micro-precision driving. Background technique [0002] In recent years, due to the rapid development of new technologies and the continuous promotion of market demand for microfluidic devices, microfluidic systems have become a research hotspot in the scientific and business circles. The driving and control of microfluidics is a problem often encountered in microfluidic systems, and it is one of the key technologies that need to be solved in the development of MEMS. With the advancement of biochip technology, it is urgent to realize the automatic and precise driving and control of microfluidics. Therefore, the development of microfluidic drive and control technology seriously affects the further miniaturization and performance improvement of microfluidic devices. At present, the research on microfluidic drive a...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04B43/12
CPCF04B43/0009F04B43/12F04B43/1223
Inventor 江海吕庆庆顾守东路崧刘建芳王吉举王全伟吴亚东王迪
Owner JILIN UNIV
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