Semiconductor laser cavity surface coating clamp

Abstract

The invention relates to a semiconductor laser cavity surface coating clamp. The clamp is a special film coating clamp for slantly fixing a Bar strip of a laser; the clamp consists of a base plate, a middle plate, a cover plate, sliding blocks and the Bar strip; the adoption of the sliding blocks with inclined surfaces is the key for realizing slant installation fixing for the Bar strip of the laser; after film coating on one surface of the laser is completed, before film coating for the cavity surface of the other surface, the Bar strip of the laser needs to be inclined at a theta angle along the other direction; the operation method comprises the following steps: putting the sliding block B on the reverse side, installing the Bar strip of the semiconductor laser slantly along the inclined surface of the sliding block B, then dismounting the cover plate A, putting the sliding block A on the reverse side, mounting the cover plate A again, fixing the Bar strip of the laser, and finally completing film coating on the other side. Through the adoption of the technical scheme of the film coating clamp for slantly fixing the Bar strip of the laser, the technical problem of shielding in the cavity surface film coating process of the laser is effectively solved, and secondary pollution of the Bar strip of the laser is also avoided.

Description

technical field [0001] The invention belongs to the field of semiconductor lasers, and is a film coating device which is important in the development and production process of semiconductor lasers and is applied to the cavity surface coating of semiconductor lasers. Background technique [0002] Cavity surface coating technology is one of the core technologies in the development and production of semiconductor lasers. The reflectivity and other properties of the coated cavity surface optical film directly affect and determine the performance of semiconductor lasers, and have an important impact on the preparation of semiconductor lasers. [0003] In order to improve the reflectivity of the optical film on the cavity surface of the semiconductor laser and the control of the coating quality, the ion-assisted physical vapor deposition coating technology under high vacuum conditions is usually used, and the quartz crystal film thickness controller and the optical film thickness c...

AI Technical Summary

Problems solved by technology

[0004] In order to solve the problem that the active area is blocked and the thickness of the optical film at the position of the active area is uncontrollable during the coating process of the laser cavity surface, this invention starts with the design of the fixture for fixing the laser bar, and proposes a technology for oblique installation and fixing of the laser bar The purpose of the solution is to expose the active area of ​​the laser cavity surface that needs to be coated in the coating environment during the coating process, so as to ensure that the film thickness deposited on the active area of ​​the laser is measurable and controllable

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