A pressurized ultrasonic cavitation three-phase abrasive flow swirl polishing processing device

Abstract

The invention discloses a supercharging ultrasonic cavitation three-phase abrasive particle flow swirling polishing device. The device comprises a disc-shaped swirling polishing tool, a workpiece mounting platform and an ultrasonic bobble generator. A machined workpiece is mounted on the workpiece mounting platform. The disc-shaped swirling polishing tool is fixedly mounted over the machined workpiece. A knurl is arranged at the bottom of the disc-shaped swirling polishing tool, and a microspur finedraw is formed between the knurl and the surface of the machined workpiece. The ultrasonic bobble generator is arranged over the disc-shaped swirling polishing tool. Through the design of the top inlet angle and a conical inner cavity, the pressure and speed of an inner flow field are increased, and a gas-liquid-solid three-phase high-speed swirling flow field is formed by cavitation bubble generated by the ultrasonic bobble generator, so that the speed of abrasive particles in the gas-liquid-solid three-phase flow field is greatly increased, and the polishing efficiency of the workpiece is improved; by arranging the knurl and adjusting the distance of the microspur finedraw, an annular machining face generated by the swirling flow field is avoided, and large-area super-smooth uniformizing polishing is achieved.

Description

technical field [0001] The invention relates to the technical field of ultra-precision machining, and more specifically, to a pressurized ultrasonic cavitation three-phase abrasive particle flow swirl polishing processing device. Background technique [0002] In view of the low efficiency of traditional solid-liquid two-phase flow polishing and small polishing area, it is difficult to apply to ultra-smooth surface processing in high-tech fields such as optics, electronic information and thin film science. Gas-liquid-solid three-phase abrasive flow polishing It has become a new difficulty and hot spot in fluid polishing technology. Ultrasonic cavitation three-phase abrasive flow swirl polishing refers to adding an ultrasonic bubble generator on the basis of the original solid-liquid two-phase swirl flow field. The ultrasonic bubble generator uses ultrasonic cavitation to generate voids in the swirl flow field. The micro-cavitation bubbles are used to drive the abrasive parti...

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Problems solved by technology

[0006] The purpose of the present invention is to solve the problem of low pressure in the processing flow field of the existing three-phase abrasive flow polishing processing device, slow flow rate, low processing efficiency, and uneven surface quality of workpiece processing, and proposes a method that can continuously stabilize cavitation bubbles. Supercharged ultrasonic cavitation three-phase abrasive particle flow swirl polishing processing device for ultra-precision surface processing of precision optical parts

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