Array zeroing device and method for self-collimation with high frequency response and large working distance

Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering, and particularly relates to an array zero-setting high-frequency-response large-work-distance auto-collimation device and method. The device is composed of a light source, a collimating mirror, a reflector and a feedback imaging system; the method comprises the steps that the reflector is adjusted to enable reflected light beams to return to the image plane center of the feedback imaging system, and angle changes of the surface of a measured object are obtained through an angular deflection measurement device on the reflector; due to the fact that the reflector is additionally arranged on a traditional auto-collimation angle measurement system, the problem that reflected light of the measured object deviates from the measurement system, and consequently measurement cannot be carried out can be avoided, and then the technical advantage that the auto-collimation work range is remarkably widened at the same work distance, or the work distance is remarkably increased within the same auto-collimation work range is achieved; in addition, by means of specific design of the collimating mirror, the feedback imaging system, the reflector and the like, the array zero-setting high-frequency-response large-work-distance auto-collimation device and method further have the advantages of being simple in structure and low in manufacturing cost. Meanwhile, high measurement speed is achieved.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to an array zeroing high-frequency response large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters t...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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