Portable combined zeroing high frequency response large working distance autocollimation device and method

Abstract

The invention belongs to the technical field of precise measurement and the field of optical engineering, and concretely relates to a portable combined zero-setting, high-frequency response and large-working distance auto-collimation apparatus and a method thereof. The apparatus is composed of a light source, a collimating mirror, a reflector and a feedback imaging system. The method comprises the following steps: the reflector is adjusted to make reflected light beams return to the center of the image plane of the feedback imaging system, and an angle deflection measuring device is used to obtain the angle change of the surface of a measured object. The reflector is arranged on a traditional auto-collimation angle measurement apparatus, so the problem of unable measurement caused by deviation of the reflected lights of the measured object from the measurement system is avoided, thereby the auto-collimation working range is greatly increased under a same working distance, or the working distance is substantially increased under a same auto-collimation working range. The concrete design of the collimating mirror, the feedback imaging system and the reflector makes the apparatus have the advantages of small size, portability and high measurement precision; and the apparatus and the method have very high measurement speed.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, and in particular relates to a portable combined zeroing high-frequency response large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a fe...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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