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MEMS-scanning-micromirror-based double-pass grating monochrometer optical path structure

A technology of scanning micromirror and monochromator, which is applied in the field of optical path structure of double-pass grating monochromator, can solve the problems of stability and instrument size limitation, achieve high stability, improve optical resolution, and high spectral resolution Effect

Inactive Publication Date: 2016-10-12
TIANJIN UNIV
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Problems solved by technology

Due to the use of a mechanical rotating mechanism for spectral scanning, its stability and instrument size are greatly limited

Method used

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  • MEMS-scanning-micromirror-based double-pass grating monochrometer optical path structure

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Embodiment Construction

[0018] The double-pass grating monochromator optical path structure based on the MEMS scanning micromirror provided by the present invention is composed of an optical circulator, an optical fiber signal input port, an incident optical fiber port, a collimating and focusing mirror, a microelectromechanical system MEMES micromirror, a grating, and a plane It consists of a reflector and an exit fiber port. The optical fiber signal input port is connected to the first port of the optical circulator, and the optical signal enters the free space from the incident optical fiber port through the second port of the optical circulator, and is irradiated on the MEMS micromirror after being collimated by the doublet lens. The signal is reflected to the grating for the first diffraction and splitting, and then the plane reflector reflects the optical signal back to the grating for the second diffraction, and the second diffracted light returns to the MEMES micromirror according to the incid...

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Abstract

The invention, which belongs to the spectrum measurement instrument field, provides an MEMS-scanning-micromirror-based double-pass grating monochrometer optical path structure. The double-pass grating monochrometer optical path structure is composed of an optical circulator, a fiber signal input port, an incident fiber port, a collimation and focusing mirror, an MEMES micro mirror, a grating, a plane mirror and an emergent fiber port. The fiber signal input port is connected with a first port of the optical circulator. An optical signal passes through a second port of the optical circulator and enters free space through the incident fiber port; after collimation of a doublet lens, the optical signal irradiates the MEMES micro mirror; the MEMES micro mirror reflects the optical signal to the grating to carry out first-time diffractive splitting; the plane mirror reflects the optical signal to the grating again according to the same path to carry out second-time diffraction; and then the processed signal enters the incident fiber port. According to the invention, the structure is mainly applied to the design and manufacturing field of the spectrum measurement instrument.

Description

technical field [0001] The invention belongs to the field of spectrum measuring instruments, and relates to microelectronic machinery, optical elements and systems, in particular to a double-pass grating monochromator optical path structure based on MEMS micromirror scanning. Background technique [0002] Spectral measuring instruments are widely used in various fields, such as color measurement, concentration detection of chemical components or electromagnetic radiation analysis. Spectroscopic instruments generally include incident slits, collimating mirrors, dispersive elements (gratings or prisms), focusing optics and detectors. In monochromators, an exit slit is usually included, allowing a very narrow portion of the entire spectrum to irradiate onto a single-pixel detector. The entrance and exit slits in a monochromator are often fixed, and the entire spectrum is scanned by rotating the grating. It is the basic equipment for observing, analyzing and processing the str...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J3/18G02B26/08
CPCG01J3/1804G01J3/1838G02B26/0833
Inventor 张尹馨庞亚军黄战华赵健盖叶
Owner TIANJIN UNIV
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