Combined zeroing high dynamic precision large working distance autocollimation device and method

Abstract

The invention belongs to the precision measurement technology field and the optical engineering field and especially relates to a combined zero-setting high-dynamic-precision long-working-distance auto-collimation device and a method thereof. The device is formed by a light source, a collimating mirror, a reflecting mirror and a feedback imaging system. Through adjusting the reflecting mirror, a reflected light beam is returned to an image plane center of the feedback imaging system. And an angle deflection measurement apparatus on the reflecting mirror is used to acquire an angle change of a measured object surface. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system in the invention, a problem that reflected light of the measured object is deviated from the measurement system so that measurement can not be performed can be avoided. Therefore, under a same working distance, an auto-collimation working range is increased or under a same working range, the working distance is increased. In addition, through specific designs of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the structure is simple and manufacturing cost is low; simultaneously, a measured object assembling process can be monitored in a whole course mode; and the measurement is rapid.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, and in particular relates to a combined zeroing high dynamic precision large working distance self-collimation device and method. Background technique [0002] In the fields of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology at a large working distance. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can measure surface angle and circular indexing; the maximum working distance From a few meters ...

AI Technical Summary

Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;

[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the laser autocollimator should not be too far away, otherwise as long as the reflected optical axis deviates from the optical axis of the autocollimator by a small angle, the reflected beam will deviate from the optical system of the laser autocollimator The entrance pupil, which leads to the inability to achieve self-collimation and micro-angle measurement

[0010] The above two problems limit the use of traditional autocollimation instruments to small angles and small working distances.

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