A laser tuning method and tuning system for tuning fork gyro based on nano-silver paste

Abstract

The present invention relates to a thick-film laser trimming method and trimming system based on nano-silver paste. The method prepares nano-silver paste suitable for tuning fork gyro characteristics through a new type of formula, and utilizes screen printing thick-film manufacturing technology to pre-process Deposit nano-silver paste masses at the end of the fork arm of the tuning fork, and use laser trimming technology to selectively remove the sintered nano-silver paste at the end of the tuning fork. Efficient and accurate on-line detection of the vibration form and frequency interval of the base, and the fast and accurate adjustment of the mechanical coupling error and frequency of the tuning fork gyroscope. This method combines nano-slurry production technology, micro-machining Combining with mature screen printing technology, the design method is reasonable and feasible, and the purpose of further improving the precision of the tuning fork gyroscope and perfecting the performance index of the gyroscope is achieved.

Description

technical field [0001] The invention relates to a tuning fork gyroscope with thick-film quality adjustment technology, in particular to a laser adjustment method and adjustment system for a tuning fork gyroscope based on nano-silver paste. Background technique [0002] Micromechanical inertial sensor is an important part of microelectromechanical system, and it is one of the fastest growing MEMS products at present. It includes a micromachined accelerometer and a micromachined gyroscope. This type of sensor has the characteristics of small size, light weight, low power consumption, easy integration, strong overload capacity and mass production. In addition, micro accelerometers and micro gyroscopes can form an inertial measurement or guidance system, while micro mechanical gyroscopes can be combined with other navigation systems such as GPS to form a highly reliable navigation and positioning system. Therefore, they are widely used in the military field, especially in sate...

AI Technical Summary

Problems solved by technology

However, in actual situations, due to the particularity of the tuning fork gyro structure and processing errors, it is actually impossible to obtain a completely symmetrical tuning fork structure. This structural asymmetry (such as size, quality, etc.) or the elastic imbalance of the beam will It will cause mechanical coupling error, and the mechanical coupling error basically does not change with time for a specific gyroscope. It is the most basic reason for measuring the deviation of the zero position signal.

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