Impedance calibration and compensation method of ATE (automatic test equipment) measuring circuit

Abstract

The invention provides an impedance calibration and compensation method of an ATE (automatic test equipment) measuring circuit. The impedance calibration and compensation method includes: step 1, manufacturing a copper block identical with a to-be-measured chip in size according to the size of the to-be-measured chip; step 2, arranging the copper block in a test clamp, wherein each test probe of the clamp contacts with the copper block; step 3, aiming at each ATE test resource channel, adopting a current-applying voltage test mode and / or a voltage-applying current test mode to test and calculate equivalent resistance of the measuring circuit; step 4, when measuring a to-be-measured signal, taking the equivalent resistance of the measuring circuit corresponding to the ATE test resource channel as an error to eliminate a numerical value related to the error from a final measured value to acquire a measuring result after calibration.

Description

technical field [0001] The present invention relates to the field of semiconductor manufacturing, more specifically, the present invention relates to an impedance calibration and compensation method in an ATE (Automatic Test Equipment) measurement circuit, which is used for calibrating and compensating the resistance on the measurement circuit when the ATE is used for testing. Background technique [0002] After the integrated circuit chip is processed, it needs to be tested, and ATE is usually used to complete the mass production test of the integrated circuit chip. ATE internal resources are connected to the pins of the chip under test through the test load board. During this process, the wiring of each channel on the ATE internal resource board and the test load board, and the peripheral circuits all have certain resistance characteristics, and the test fixture installed on the test load board itself also has certain resistance; at the same time, the ATE resource The con...

AI Technical Summary

Problems solved by technology

However, if a large current is applied, even if the resistance in the line is small, the error voltage drop will be large if the current is multiplied by the resistance, which will affect the test result and cause the test to fail

[0004] If the calibration compensation is not performed for the influence caused by the resistance characteristics on the measurement channel, it may cause misjudgment of the test results

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