Impedance calibration and compensation method of ATE (automatic test equipment) measuring circuit

A technology for measuring circuit and impedance calibration, which is applied in the direction of measuring electricity, measuring devices, measuring electrical variables, etc., can solve the problems of affecting test results, misjudgment of test results, large error voltage drop, etc., to achieve accurate test results and reduce test errors , the effect of eliminating the influence

Inactive Publication Date: 2016-11-23
SINO IC TECH
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  • Claims
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Problems solved by technology

However, if a large current is applied, even if the resistance in the line is small, the error voltage drop will be large if the current is multiplied by the resistance, which will affect the test result and

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  • Impedance calibration and compensation method of ATE (automatic test equipment) measuring circuit
  • Impedance calibration and compensation method of ATE (automatic test equipment) measuring circuit

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[0022] In order to make the content of the present invention clearer and easier to understand, the content of the present invention will be described in detail below with reference to specific embodiments and drawings.

[0023] figure 1 The schematic diagram of the equivalent resistance of the ATE measurement circuit is shown schematically. Such as figure 1 As shown, in the ATE measurement circuit, the test signal is output from the internal resources of the ATE, the signal channel of the test resource board itself has a resistance R1; the ATE resource interface is connected to the test load board and there is a contact resistance R2; the test load board is wired and peripheral There is an equivalent resistance R3; there is a contact resistance R4 connected to the test fixture on the test load board, and a test probe (pogo pin) of the test fixture itself has a resistance R5; the test fixture test probe (pogo pin) is in contact with the chip Impedance R6, the sum of all these resi...

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Abstract

The invention provides an impedance calibration and compensation method of an ATE (automatic test equipment) measuring circuit. The impedance calibration and compensation method includes: step 1, manufacturing a copper block identical with a to-be-measured chip in size according to the size of the to-be-measured chip; step 2, arranging the copper block in a test clamp, wherein each test probe of the clamp contacts with the copper block; step 3, aiming at each ATE test resource channel, adopting a current-applying voltage test mode and/or a voltage-applying current test mode to test and calculate equivalent resistance of the measuring circuit; step 4, when measuring a to-be-measured signal, taking the equivalent resistance of the measuring circuit corresponding to the ATE test resource channel as an error to eliminate a numerical value related to the error from a final measured value to acquire a measuring result after calibration.

Description

technical field [0001] The present invention relates to the field of semiconductor manufacturing, more specifically, the present invention relates to an impedance calibration and compensation method in an ATE (Automatic Test Equipment) measurement circuit, which is used for calibrating and compensating the resistance on the measurement circuit when the ATE is used for testing. Background technique [0002] After the integrated circuit chip is processed, it needs to be tested, and ATE is usually used to complete the mass production test of the integrated circuit chip. ATE internal resources are connected to the pins of the chip under test through the test load board. During this process, the wiring of each channel on the ATE internal resource board and the test load board, and the peripheral circuits all have certain resistance characteristics, and the test fixture installed on the test load board itself also has certain resistance; at the same time, the ATE resource The con...

Claims

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Application Information

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IPC IPC(8): G01R35/00G01R31/28
CPCG01R35/005G01R31/2834G01R31/2851
Inventor 钭晓鸥余琨王华邓维维郝丹丹叶建明
Owner SINO IC TECH
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