Measuring Device and method for scattered light
A measuring device and stray light technology, which are used in photoplate-making process exposure devices, optical performance testing, microlithography exposure equipment, etc., can solve problems such as large errors, high requirements for sensor signal-to-noise ratio, and large size effects, etc. Achieve low signal-to-noise ratio, avoid constraints and measurement errors, and improve measurement accuracy
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0033] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.
[0034] The invention proposes a method for indirect measurement of stray light using the relationship between system stray light and phase. Compared with the traditional measurement device, it reduces the requirement for the signal-to-noise ratio of the sensor, improves the measurement accuracy, and avoids the dependence of the exposure measurement method on the process conditions, and can be used for online measurement.
[0035] figure 1 It is a structural schematic diagram of the stray light measuring device involved in the present invention. like figure 1 As shown, the stray light measurement device provided by the present invention includes a light source 1 , an illumination system 2 , an object plane mask 3 , a mask table 4 , a projection objective lens 5 , and a workpiece table 6 arranged in sequence along the optical axis. The illumi...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com