Self-selection resistive random access memory suitable for intersected array, and reading method thereof
A technology of resistive variable memory and self-selection resistance, which is applied to the structure of non-volatile memory, the structure and reading field of self-selection resistance variable memory, which can solve the problems of high process complexity, achieve simple structure and preparation process, and suppress leakage current , the effect of high compatibility
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[0031] The present invention will be further described below by embodiment. It should be noted that the purpose of the disclosed embodiments is to help further understand the present invention, but those skilled in the art can understand that various replacements and modifications are possible without departing from the spirit and scope of the present invention and the appended claims of. Therefore, the present invention should not be limited to the content disclosed in the embodiments, and the protection scope of the present invention is subject to the scope defined in the claims.
[0032] A self-selective resistive memory with a volatile low-resistance state, its structure is as follows figure 1 shown. The device bottom electrode 2' and the resistive dielectric layer 3' are Pt and Ta 2 o 5 . In the traditional bipolar RRAM structure, one electrode usually uses an active material such as TiN, with a thickness of about 100 nm, which plays the role of generating oxygen va...
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