Self-selection resistive random access memory suitable for intersected array, and reading method thereof

A technology of resistive variable memory and self-selection resistance, which is applied to the structure of non-volatile memory, the structure and reading field of self-selection resistance variable memory, which can solve the problems of high process complexity, achieve simple structure and preparation process, and suppress leakage current , the effect of high compatibility

Active Publication Date: 2016-11-30
PEKING UNIV
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  • Abstract
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  • Claims
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Problems solved by technology

However, the existing self-selection RRAM devices often need to introduce special electrode materials or more dielectric layers, and the complexity of the process is still high

Method used

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  • Self-selection resistive random access memory suitable for intersected array, and reading method thereof
  • Self-selection resistive random access memory suitable for intersected array, and reading method thereof
  • Self-selection resistive random access memory suitable for intersected array, and reading method thereof

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Embodiment Construction

[0031] The present invention will be further described below by embodiment. It should be noted that the purpose of the disclosed embodiments is to help further understand the present invention, but those skilled in the art can understand that various replacements and modifications are possible without departing from the spirit and scope of the present invention and the appended claims of. Therefore, the present invention should not be limited to the content disclosed in the embodiments, and the protection scope of the present invention is subject to the scope defined in the claims.

[0032] A self-selective resistive memory with a volatile low-resistance state, its structure is as follows figure 1 shown. The device bottom electrode 2' and the resistive dielectric layer 3' are Pt and Ta 2 o 5 . In the traditional bipolar RRAM structure, one electrode usually uses an active material such as TiN, with a thickness of about 100 nm, which plays the role of generating oxygen va...

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Abstract

The invention discloses a self-selection resistive random access memory suitable for an intersected array, and a reading method thereof. The self-selection resistive random access memory employs a quite thin active electrode, has a volatile low resistance state, through combination with a quite small current-limiting value and specific reading operation, when being applied to a cross intersected array, can inhibit leakage currents, and realizes selection-free high-density integration of a resistance variable unit.

Description

technical field [0001] The invention relates to a resistive memory (RRAM), in particular to a structure and a reading method of a self-selecting resistive memory suitable for a cross array, belonging to a non-volatile memory (Non-volatile memory) in a CMOS ultra-large-scale integration (ULSI) ) structure and its application fields. Background technique [0002] Non-volatile memory is an important part of semiconductor devices. In recent years, with the rise of mobile Internet, Internet of Things and other technologies, the demand for non-volatile memory is increasing. Flash device, as a representative of non-volatile memory, has also been continuously shrinking according to Moore's law. However, in recent years, when the feature size is close to 20nm, the further reduction of devices has encountered great challenges, such as the increase of crosstalk between data, the increase of device parameter fluctuations, the degradation of device reliability, and so on. To meet this...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L45/00H01L27/24
CPCH10B63/00H10N70/00
Inventor 蔡一茂潘越王宗巍喻志臻黄如
Owner PEKING UNIV
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