Graphite boat assembling and disassembling machine capable of preventing internal silicon wafer from being damaged and counting graphite boat
A technology for graphite boats and silicon wafers, applied in the field of graphite boat loading and unloading machines, can solve the problems of uncalculated graphite boat loading and unloading quantity, uneven force on silicon wafers, complicated technology, etc., to achieve convenient statistics of work quantity, safe and convenient use, Scientific and reasonable structure
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[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0015] see figure 1 and figure 2 , the present invention provides a technical solution: a graphite boat loading and unloading machine for preventing internal silicon chips from being damaged and counting graphite boats, including an infrared emitter 11, a mechanical sucker 12 and a loading and unloading machine shell 13, and a loading and unloading machine shell The bottom of 13 is provided with a base pillar 1, and the front surface lower right of the loadi...
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