A six-degree-of-freedom micro-vibration suppression platform and its control method

Abstract

The six-degree-of-freedom micro-vibration suppression platform of the present invention includes a base platform, a load platform, six identical sets of single-degree-of-freedom active-passive composite vibration isolation devices and controllers, and the upper and lower ends of each single-degree-of-freedom active-passive composite vibration isolation device Connect with load platform and base platform respectively. The control method of the present invention includes the steps of calculating the logic axis signal, calculating the logic axis control signal, calculating the real-time control signal of the physical axis and transmitting. The present invention has simple structure and adjustable stiffness, can suppress and isolate six-degree-of-freedom micro-vibrations in the translational direction and rotational direction of the X-axis, Y-axis, and Z-axis, can be suitable for different occasions, and can effectively attenuate vibrations in different frequency bands. Micro-vibration provides a reliable guarantee for precision machining and measuring equipment in a micro-vibration environment, solves the problems of complex structure and cumbersome control methods in existing active-passive composite vibration isolation mechanisms, and realizes multi-degree-of-freedom vibration suppression.

Description

technical field [0001] The invention belongs to the field of micro-vibration isolation and suppression, and more specifically relates to a six-degree-of-freedom micro-vibration suppression platform and a control method thereof. Background technique [0002] There are micro-vibrations in some complex working environments, and these micro-vibrations are the key factors affecting the processing or working accuracy of equipment. The traditional passive vibration isolator is composed of mass-spring-damping elements. Due to the inherent contradiction between the transmission rate of low-frequency vibration and the attenuation rate of high-frequency vibration, it cannot meet the vibration isolation requirements of precision machining; compared with passive vibration isolation mechanisms, Active vibration isolation has greatly improved the performance of the system, but it requires a sensor-actuator pair and a corresponding active control system, which requires the active vibration ...

AI Technical Summary

Problems solved by technology

[0009] The invention provides a six-degree-of-freedom micro-vibration suppression platform, and at the same time provides its control method, which solves the problems of complex structure and cumbersome control methods existing in the existing active-passive composite vibration isolation mechanism

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