High precision, wide range and large working distance laser auto-collimation device and method

A working distance and self-collimation technology, which is applied in the direction of optical devices, measuring devices, instruments, etc., can solve the problems that self-collimation and micro-angle measurement cannot be realized, the reflected beam deviates from the entrance pupil, and the range cannot be too large.

Active Publication Date: 2017-01-11
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] First, the range of the angle between the normal of the mirror surface of the measured object 5 and the optical axis of the laser autocollimator should not be too large, otherwise the reflected beam will deviate from the entrance pupil of the laser autocollimator optical system, resulting in failure to achieve self-collimation Straight and micro angle measurement;
[0009] Second, the distance between the mirror surface of the measured object 5 and the entrance pupil of the la

Method used

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  • High precision, wide range and large working distance laser auto-collimation device and method
  • High precision, wide range and large working distance laser auto-collimation device and method
  • High precision, wide range and large working distance laser auto-collimation device and method

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specific Embodiment 1

[0086] This embodiment is an embodiment of a laser self-collimation device with high precision, wide range and large working distance.

[0087] A high-precision, wide-range and large working distance laser self-collimation device in this embodiment, the schematic structural diagram is as follows figure 2 shown. The self-collimation device includes a light source 1, a transmissive collimating mirror 21, a reflector 3, and a feedback imaging system 6. The reflector 3 is provided with an angle adjustment measuring device 4; the light beam emitted from the light source 1 passes through the transmissive collimator. After the straight mirror 21 is collimated into a parallel beam, it is reflected by the mirror 3 and incident on the surface of the object to be measured 5; the beam reflected from the surface of the object to be measured 5 is reflected by the mirror 3 and then collected by the feedback imaging system 6 imaging;

[0088] The feedback imaging system 6 includes an image...

specific Embodiment 2

[0096] This embodiment is an embodiment of a laser self-collimation device with high precision, wide range and large working distance.

[0097] A high-precision, wide-range and large working distance laser self-collimation device in this embodiment is different from the specific embodiment 1 in the structure of the feedback imaging system 6; the structure of the feedback imaging system 6 in this embodiment is in the following two forms one of:

[0098] First, the feedback imaging system 6 includes a first feedback beam splitter 61, an image sensor 65 and a four-quadrant detector 66 carried by a guide rail 68, such as Image 6 The guide rail 68 has two pause positions, one pause position makes the image plane center of the image sensor 65 correspond to the focal position of the transmissive collimating mirror 21, and the other pause position makes the image plane center of the four-quadrant detector 66 correspond to the transmissive type the focal position of the collimating m...

specific Embodiment 3

[0101] This embodiment is an embodiment of a laser self-collimation device with high precision, wide range and large working distance.

[0102] A high-precision, wide-range and large working distance laser self-collimation device in this embodiment, the schematic structural diagram is as follows Figure 8 shown. On the basis of the specific embodiment 1, a high-precision, wide-range and large working distance laser auto-collimation device in this embodiment is further provided with a wavefront detection system 7 and a wavefront compensation system 8;

[0103] The wavefront detection system 7 includes a wavefront detection spectroscope 71 and an air disturbance wavefront detector 72; the wavefront detection spectroscope 71 is arranged between the reflection mirror 3 and the measured object 5, and the air disturbance wavefront detector 72 is arranged on the reflected light path of the wavefront detection beam splitter 71, and the mirror deformation wavefront detector 73 is arra...

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Abstract

The invention belongs to the technical field of precision measurement and the field of optical engineering and specifically relates to a high precision, wide range and large working distance laser auto-collimation device and method. The device consists of a light source, a collimating mirror, a reflecting mirror and a feedback imaging system; according to the method, via adjustment of the reflecting mirror, a reflected light beam is enabled to return to a center of an image plane of the feedback imaging system; an angular deflection measurement device on the reflecting mirror is used for obtaining angular variation of a surface of an object being tested. Because the reflecting mirror is added in a traditional auto-collimation angle measurement system, a problem that measurement cannot be realized when light reflected by the object being tested is deviated from a measurement system can be prevented; an auto-collimation working scope can be markedly expanded while working distance remains the same or working distance is markedly increased while the auto-collimation working scope remains the same; via specific design of the collimating mirror, the feedback imaging system, the reflecting mirror and the like, the high precision, wide range and large working distance laser auto-collimation device is enabled to be characterized by simple structure and low manufacture cost; rapid measurement can be realized.

Description

technical field [0001] The invention belongs to the technical field of precision measurement and the field of optical engineering, in particular to a laser self-collimation device and method with high precision, wide range and large working distance. Background technique [0002] In the field of precision measurement technology, optical engineering, cutting-edge scientific experiments and high-end precision equipment manufacturing, there is an urgent need for large working range and high-precision laser self-collimation technology under large working distances. It supports the development of technology and equipment in the above fields. [0003] In the field of precision measurement technology and instruments, the combination of laser autocollimator and circular grating can measure any line angle; the combination of laser autocollimation technology and polyhedral prism can perform surface angle measurement and circular indexing measurement; the maximum working distance From...

Claims

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Application Information

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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 谭欣然王超谭久彬
Owner HARBIN INST OF TECH
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