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Mining MEMS anemometer electric insulation self-cleaning packaging method

An encapsulation method and self-cleaning technology, applied in measurement devices, fluid velocity measurement, velocity/acceleration/impact measurement, etc., to achieve the effects of improving hydrophobicity, high insulation, and reducing surface energy

Inactive Publication Date: 2017-01-18
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The purpose of the present invention is to solve technical bottlenecks such as insulation and self-cleaning of MEMS anemometers used in mines, and to propose an electrical insulation and self-cleaning packaging method for MEMS anemometers used in mines

Method used

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  • Mining MEMS anemometer electric insulation self-cleaning packaging method
  • Mining MEMS anemometer electric insulation self-cleaning packaging method
  • Mining MEMS anemometer electric insulation self-cleaning packaging method

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Embodiment Construction

[0024] A mining MEMS anemometer electric insulation self-cleaning packaging method, comprising the following steps: (a) Parylene film deposition: put the vector anemometer into the film deposition system, add 3.2 grams of parylene particles to the trough of the film deposition system , turn on the parylene film deposition system, and after 2 hours at -100°C, a dense parylene film of 2 microns is deposited on the surface of the vector anemometer (the instrument required for this step is produced by SCS, model is PDS2010); (b) use ICP etching machine to process Parylene film, and use SF 6 For plasma treatment, the settings of the ICP etching machine are as follows: the chamber pressure is set to 30mT (1mT is 0.133Pa, 30mT is 3.99Pa, about 0.00004 atmospheres), the RF power of the upper and lower electrodes is 700w and 45w respectively, SF 6 The flow rate is 90sccm, and the etching can be completed after 420s at a temperature of 20°C. At this time, a highly hydrophobic surface is...

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Abstract

The invention relates to a mining MEMS anemometer and particularly relates to a mining MEMS anemometer electric insulation self-cleaning packaging method. The method comprises steps that (a), Parylene film deposition is carried out: a CVD method is employed on an outer surface of a vector anemometer to deposit a 2-micrometer thickness Parylene film; (b), an ICP etching machine is employed to process the Parylene film, SF6 is employed to carry out plasma treatment, and a high hydrophobic surface is formed on the surface of the Parylene film. According to the method, insulation property of the Parylene film is utilized, on the basis of a lotus-leaf-like self-cleaning effect hydrophobic treatment mode, the SF6 is employed to carry out plasma treatment to form the high hydrophobic surface on the surface of the Parylene film, micro-structure electric insulation self cleaning is realized, and good consistency and batch processing can be realized.

Description

technical field [0001] The invention relates to a mining MEMS anemometer, in particular to an electrical insulation self-cleaning packaging method for a mining MEMS anemometer. Background technique [0002] Coal enterprises are high-risk industries, and safe production is the top priority of coal mine production. The mine ventilation system is an important part of the mine production system, and the condition of the mine ventilation system determines the safety of the entire mine; at the same time, the mine ventilation system is also " One pass and three defenses" (ventilation, gas prevention, coal dust prevention, fire prevention) basis. Mine roadways are criss-crossed and interpenetrated. In order to ensure that the air flow flows along the required direction and route, ventilation facilities for air flow control are installed in some roadways. If these facilities break down and cannot function as they should, there will be turbulent wind flow and harmful gas gushing out,...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P5/08
CPCG01P5/08
Inventor 王任鑫张国军任子明白冰贾传令薛晨阳
Owner ZHONGBEI UNIV
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