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Crossed waveguide structure for cross-shaped slot waveguides and preparation method of crossed waveguide structure

A cross-slot and waveguide structure technology is applied in the field of optical waveguides to achieve high integration, low cross loss and crosstalk, and low cost.

Active Publication Date: 2017-02-01
GUANGXI UNIV
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  • Abstract
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  • Claims
  • Application Information

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Problems solved by technology

However, the SOI-based cross slot waveguide has a double-layer structure, which is different from the general SOI-based optical waveguide structure, and its cross waveguide structure also requires special design.
No cross waveguide structure suitable for cross slot waveguides based on SOI materials has been reported yet

Method used

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  • Crossed waveguide structure for cross-shaped slot waveguides and preparation method of crossed waveguide structure
  • Crossed waveguide structure for cross-shaped slot waveguides and preparation method of crossed waveguide structure
  • Crossed waveguide structure for cross-shaped slot waveguides and preparation method of crossed waveguide structure

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Embodiment Construction

[0033] The technical solution of the present invention will be described in further non-limiting detail below in combination with preferred embodiments and accompanying drawings.

[0034] The unoptimized slotted intersecting waveguide structure in the prior art has a large loss and crosstalk, which is mainly due to the sudden change and discontinuity of the refractive index at the intersection of the waveguide, which causes the scattering and reflection of the optical signal. The purpose of the present invention is to make the change of the refractive index of the slot crossing waveguide structure as smooth as possible at the intersection of waveguides, reduce the scattering and reflection of optical signals, thereby reducing the loss and crosstalk of the crossing waveguide structure.

[0035] see figure 1 , the cross waveguide structure of the cross slot waveguide of the present invention includes: an input / output area, a transition area, and a cross area, the input / output ar...

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Abstract

The invention discloses a crossed-shaped slot crossed waveguide structure. The crossed-shaped slot crossed waveguide structure comprises an input / output area, a transition area and a crossing area; the input / output area is used for inputting and outputting signals and composed of common cross-shaped slot straight waveguides; the transition area is used for connecting the orthogonal straight waveguides and composed of cross-shaped slot bent waveguides, and perpendicular slots of the cross-shaped slot bent waveguides are filled with high refractive silica; the crossing area is used for achieving crossing of two cross-shaped slot crossed waveguide structures and composed of two parallel high refractive silica waveguides. According to the crossed waveguide structure, crossing consumption and crosstalk are low, the high refractive silica waveguide structures of which the width gradually changes are adopted, no resonant structure is related, large working bandwidth is needed, and the allowance of the preparation technology is high.

Description

technical field [0001] The invention relates to an optical waveguide applied in the fields of optical communication, optical interconnection, optical computing, optical sensing, etc., and in particular to a cross waveguide structure of a cross slot waveguide based on SOI material and a preparation method thereof. Background technique [0002] With the emergence of multi-core microprocessors and the increasing integration of transistors in microprocessors, the demand for direct and internal interconnection bandwidth of microprocessors is also increasing, and electrical interconnection has large power consumption and time extension. , crosstalk and other parasitic effects are becoming more and more serious, and become a bottleneck for the further increase of interconnection bandwidth. Silicon-on-Insulator (Silicon-on-Insulator, SOI) is a silicon material used in large-scale integrated circuits. Its superior optical properties have attracted people's attention, and optical inte...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B6/125G02B6/13G02B6/136G02B6/132
CPCG02B6/125G02B6/13G02B6/132G02B6/136
Inventor 耿敏明
Owner GUANGXI UNIV
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