Flexible AMOLED display device preparation method
A manufacturing method and display technology, which are applied in semiconductor/solid-state device manufacturing, electric solid-state devices, semiconductor devices, etc., can solve problems such as protrusions and depressions of the flexible substrate 200, cleaning, damage to the flexible substrate 200, etc., and achieve improved resistance. Water and oxygen barrier properties, high level of flatness, the effect of ensuring optical performance
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[0038] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0039] see Figure 5 , the invention provides a method for manufacturing a flexible AMOLED display, comprising the steps of:
[0040] Step 1, such as Image 6 As shown, a rigid substrate 10 is provided, and the rigid substrate 10 is cleaned (initialClean).
[0041] Specifically, in the step 1, the rigid substrate 10 is a glass substrate.
[0042] Step 2, such as Figure 7 As shown, an inorganic film layer 20 with a flat surface is formed on the rigid substrate 10 .
[0043] Specifically, in the step 2, the inorganic film layer 20 is formed by using plasma enhanced chemical vapor deposition (PECVD, PlasmaEnhanced Chemical Vapor Deposition).
[0044] The inorganic film layer 20 can improve the planarization degree of the surface of the rigid ...
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