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Automated sample-preparation device

A technology for making devices and samples, which is applied in the field of automatic sample making devices, and can solve problems such as inability to achieve proper automation for improving position accuracy

Active Publication Date: 2017-02-22
HITACHI HIGH TECH SCI CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In the apparatus related to the above-mentioned prior art, along with the miniaturization of the sample piece, it is impossible to improve the positional accuracy required for high-precision processing of a plurality of sample pieces into a uniform shape and to appropriately automate the sampling operation of the sample piece. technology

Method used

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Embodiment Construction

[0058] Next, an automatic sample preparation device capable of automatically preparing samples according to an embodiment of the present invention will be described with reference to the drawings.

[0059] figure 1 It is a block diagram of the automatic sample preparation apparatus 10 provided with the charged particle beam apparatus 10a concerning embodiment of this invention. The automatic sample preparation device 10 according to the embodiment of the present invention includes a charged particle beam device 10a. Charged particle beam device 10a such as figure 1 As shown, a sample chamber 11 capable of maintaining the inside in a vacuum state, a stage 12 capable of fixing a sample S and a sample sheet holder P inside the sample chamber 11 , and a drive mechanism 13 for driving the stage 12 are provided. The charged particle beam device 10a includes a focused ion beam irradiation optical system 14 for irradiating a focused ion beam (FIB) to an irradiation target within a p...

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Abstract

A charged-particle-beam device (10a) in this invention is provided with at least the following: a sample-fragment holder (P); a needle (18); and a computer (21) that, on the basis of an image of a sample fragment (Q), said image having been obtained in advance via a plurality of charged-particle beams, controls a plurality of optical systems for emitting the charged-particle beams, the needle (18), and a gas supply unit (17) so as to transfer the sample fragment (Q) to the location of the sample-fragment holder (P), said location having been determined in advance.

Description

technical field [0001] The invention relates to an automatic sample making device. Background technique [0002] Currently, there is known a device for processing the shape of a sample piece taken out from a sample into a shape suitable for various processes such as observation, analysis, and measurement using electron beams such as scanning electron microscopes and transmission electron microscopes (such as , refer to Patent Document 1). This device produces a sample sheet by irradiating a sample with a beam of charged particles consisting of electrons or ions. [0003] Patent Document 1: Japanese Patent Application Laid-Open No. 11-108810 [0004] In the apparatus related to the above-mentioned prior art, along with the miniaturization of sample pieces, it is impossible to improve the positional accuracy required for processing a plurality of sample pieces into a uniform shape with high precision and to appropriately automate the sampling operation of the sample pieces. ...

Claims

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Application Information

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IPC IPC(8): G01N1/28H01J37/31H01J37/317
CPCG01N1/286G01N1/32H01J2237/20285H01J2237/31745H01J2237/208H01J37/3023G01N1/28H01J37/31H01J37/317G01N1/44
Inventor 上本敦麻畑达也佐藤诚山本洋
Owner HITACHI HIGH TECH SCI CORP
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