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Assembling auxiliary device for large-scale vertical HVPE reaction chamber

An assembly-assisted, vertical technology, applied in the direction of chemical reactive gas, single crystal growth, crystal growth, etc., can solve the problems of complex component structure, affecting the service life of components, frequent disassembly and assembly, etc., to achieve high precision, improve Assembly efficiency, the effect of reducing the workload of disassembly and assembly

Active Publication Date: 2017-03-01
SINO NITRIDE SEMICON
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] HVPE reaction chambers are generally divided into two types: vertical type and horizontal type, and vertical HVPE reaction chambers are usually multi-layer stacked structures. With 11 pieces or even 21 pieces, the overall height will increase accordingly, the number of parts will increase accordingly, and the structure of the parts will be more complex, resulting in a great increase in the control of assembly accuracy and the difficulty of assembly
[0004] The core component of the vertical HVPE reaction chamber is located in the upper part of its overall assembly, which has the characteristics of high positioning accuracy, usually not easy to wear out, and does not need to be disassembled. Every time the consumable parts are replaced, it is necessary to repeatedly disassemble and assemble the unworn parts on the upper part, which not only increases the workload of disassembly and assembly, but also makes it difficult to control the assembly accuracy of the HVPE reaction chamber and even the stability of the equipment
[0005] Furthermore, most of the assembly parts of the HVPE reaction chamber are made of quartz material, which is fragile and fragile. Repeated disassembly and assembly will inevitably accelerate its wear and tear, which will affect the service life of the parts.

Method used

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  • Assembling auxiliary device for large-scale vertical HVPE reaction chamber
  • Assembling auxiliary device for large-scale vertical HVPE reaction chamber

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0018] In this example, if figure 1 As shown, there are 6 hoisting load-bearing columns 2, all of which adopt a cylindrical structure; there are 3 precision-adjusting load-bearing plates 3, all of which are ring structures, and are arranged between the inner and outer edges of the plates. The 6 fixed round holes for installation can be inserted into the 6 hoisting load-bearing columns 2 correspondingly to form a stable connection with them, and the fixed connection method adopts the form of nut locking.

[0019] In order to ensure that the frame can withstand the high temperature working environment of 1300K, and it is not easy to volatilize and has a certain rigidity, the hoisting load-bearing column 2 and the precision adjustment load-bearing plate 3 are all made of high-purity molybdenum material, and the top flange 1, its environment The temperature is relatively low, and 316L stainless steel can be used.

[0020] The specific assembly of the auxiliary device is as follow...

Embodiment 2

[0023] In this example, if figure 1 As shown, there are 6 hoisting load-bearing columns 2, all of which adopt a cylindrical structure; there are 3 precision-adjusting load-bearing plates 3, all of which are ring structures, and are arranged between the inner and outer edges of the plates. The 6 fixed round holes for installation can be inserted into the 6 hoisting load-bearing columns 2 correspondingly to form a stable connection with them, and the fixed connection method adopts the form of nut locking.

[0024] In order to ensure that the frame can withstand the high temperature working environment of 1300K, and it is not easy to volatilize and has a certain rigidity, the hoisting load-bearing column 2 and the precision-adjusted load-bearing plate 3 are all made of high-purity tungsten material, and the top flange 1, its environment The temperature is relatively low, and 316L stainless steel can be used.

[0025]The specific assembly of the auxiliary device is as follows: ad...

Embodiment 3

[0028] In this embodiment, when a certain part in the B area of ​​the large vertical HVPE reaction chamber is worn out and needs to be replaced and maintained, the auxiliary frame is first removed as a whole together with the A area of ​​the large vertical HVPE reaction chamber; after that, the jacket is disassembled Pipe 6 and load-bearing pipe 4 can disassemble and replace the consumable parts in area B; after the replacement is completed, follow the reverse direction of the disassembly process, first install the components in area B and fix them with the bottom flange 5, and install the load-bearing The tube 4 and the outer tube 6; finally, the frame of the auxiliary device together with the parts in the A area are hoisted and moved to the load-bearing part as a whole, and the two major areas of A and B are connected, and finally the large vertical HVPE reaction chamber is completed the overall assembly.

[0029] Because in the process of disassembly, replacement and reasse...

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Abstract

The invention relates to an assembling auxiliary device for a large-scale vertical HVPE reaction chamber. The assembling auxiliary device is composed of a top flange, a hoisting load-bearing pillar and a precision adjusting bearing plate. Two ends of the hoisting load-bearing pillar are both equipped with a limit moving structure capable of adjusting upper and lower motion range. The load-bearing ratio of weight of the large-scale vertical HVPE reaction chamber on a load-bearing pipe to weight of the large-scale vertical HVPE reaction chamber on an outer sleeve can be adjusted after general assembling of the large-scale vertical HVPE reaction chamber. The precision adjusting bearing plate can bear and accurately adjust concentricity and levelness of parts. For assembling of the large-scale vertical HVPE reaction chamber, two big areas A and B are divided for separate assembly by the assembling auxiliary device, and then overall assembling is carried out. Therefore, the problem of assembling inconvenience caused by too high height of the reaction chamber can be effectively solved, assembling precision and assembling efficiency are obviously enhanced, and the influence on precision of superfluous dismounting of the upper body and equipment stability is avoided during maintenance and dismounting.

Description

technical field [0001] The invention relates to an assembly auxiliary device for semiconductor material growth equipment, more specifically, to an assembly auxiliary device for a large vertical HVPE reaction chamber. Background technique [0002] With breakthroughs in technology research and development, the application of GaN in various fields such as LEDs, power devices, solar energy, and integrated circuits has developed rapidly, and the hydride vapor phase epitaxy (HVPE) technology is the current stage that can quickly and high-quality prepare GaN substrates. The effective method of controlling the structure of the HVPE reaction chamber and improving the accuracy and speed of assembly can further improve the process stability and efficiency of GaN substrate preparation. [0003] HVPE reaction chambers are generally divided into two categories: vertical type and horizontal type, and vertical HVPE reaction chambers are usually multi-layer stacked structures. With 11 piece...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B25/08C30B29/40
Inventor 王健辉刘鹏张茶根张国义童玉珍
Owner SINO NITRIDE SEMICON
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