Fiber-based atomic force microscope probe and atomic force microscope system

Abstract

The invention relates to a fiber-based atomic force microscope probe and an atomic force microscope system. The fiber-based atomic force microscope probe comprises a probe pin and a micro cantilever beam; and the probe pin is arranged at one end of the micro cantilever beam arranged at one end of a fiber. A fiber F-P cavity is formed between the micro cantilever beam and one end surface of the fiber by a connecting arm. And the micro cantilever beam is used for sensing a change of a distance between the probe pin and a sample. When the length of the F-P cavity changes due to deformation of the micro cantilever beam, the reflected light intensity is modulated by the fiber F-P cavity.

Description

technical field [0001] The invention belongs to the scanning direction of sample surface topography in the fields of material science, experimental physics and biomolecules, and in particular relates to an optical fiber-based atomic force microscope probe and an atomic force microscope system. Background technique [0002] Atomic Force Microscope is an analytical instrument that can be used to study the surface structure of solid materials including insulators, biomolecules, etc. The basic principle of the atomic force microscope is: fix one end of a microcantilever that is extremely sensitive to weak force, There is a tiny probe at the other end of the micro-cantilever beam. When the distance between the micro-cantilever beam probe and the sample surface is very close, there is an extremely weak interaction force between the atoms at the probe tip and the atoms on the sample surface (10 -12 ~10 -6 N), the micro-bending deformation of the micro-cantilever will occur. The f...

AI Technical Summary

Problems solved by technology

[0009] The light reflection detection method has the advantages of high sensitivity and high detection accuracy, but the measurement system based on the current cantilever beam probe structure is relatively complex, uses a large number of optical devices, and is complicated to operate and bulky, which is not conducive to system simplification and miniaturization. Limiting its use in biological detection and micro-measurement environments, the shortcomings of current cantilever beam probe measurements are:

[0010] (1) The system needs to be calibrated before testing, and the operation is complicated:

[0011] The cantilever beam probe and the optical signal detection part are independent structures. It is necessary to adjust the relative position of the micro-cantilever beam and each optical collimation device to ensure the transmission of the optical circuit. The relative position of each device needs to be precisely calibrated to ensure the measurement accuracy of the system. Difficulty of using the system;

[0012] (2) The structure is complex and bulky, which is not conducive to the miniaturization design of the system:

[0013] The optical detection system uses a variety of optical collimation devices, resulting in complex structure, high cost, and large volume of the entire system, which is not conducive to the miniaturization design of the system and limits the scope of use of the system;

[0014] (3) Not suitable for long-distance detection:

[0017] (5) The material properties of the cantilever beam probe and its supporting structure are inconsistent, or the material of the probe and the micro-cantilever beam is inconsistent, which may easily cause temperature drift errors caused by material thermal mismatch and stress problems between different materials

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