A folded nerve electrode array system and its preparation method
An electrode array and nerve technology, applied in the field of micromachining, can solve the problems of difficulty in simultaneously improving the spatial resolution of nerve electrodes, nerve electrode signal-to-noise ratio, electrode failure, etc. Effects of Resolution and Sensitivity
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Embodiment 1
[0046] like figure 1 , figure 2 and image 3 As shown, the wrinkled nerve electrode array system provided by Embodiment 1 of the present invention includes a package body 1, an external interface 2, and a wrinkled electrode array 3. The package body 1 includes an elastic substrate 11 and an insulator 12, and the electrode array 3 and The upper surface of the elastic substrate 11 is laminated, the electrode array 3 and the external transfer interface 2 are connected through the outer lead 4, and the insulator 12 is pasted on the elastic substrate 11 and the external transfer interface 2 to package the electrode array 3 and the outer lead 4 In the package 1 , the insulator 12 is provided with a notch 120 , the electrode array 3 includes one or more nerve electrodes 31 , and the notch 120 exposes the effective detection parts of the nerve electrodes 31 .
[0047] The folded nerve electrode array system of the present invention covers the inner leads, bonding sites, outer leads, ...
Embodiment 2
[0062] The preparation method of the folded nerve electrode system provided by the second embodiment of the present invention includes the following steps:
[0063] Step 1, preparing an elastic substrate;
[0064] The elastic substrate can choose SMOOTH-ON Ecoflex series silicone, polydimethylsiloxane or 3M VHB series adhesive tape. In this example, SMOOTH-ON Ecoflex series silicone Ecoflex 0030 is used to make the elastic substrate. Take the same amount of Ecoflex 0030A glue and Ecoflex 0030B glue and mix evenly. After vacuum defoaming, pour it into a pre-prepared container and let it stand for curing. It is necessary to ensure that the bottom of the container is clean and flat. By adjusting the amount of glue taken and the volume of the container, the thickness of the cured elastic substrate can be conveniently regulated.
[0065] Step 2, after depositing SiO 2 The electrode array is prepared on the Si substrate;
[0066] While waiting for the elastic substrate to solidi...
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