Z-direction micro displacement structure based on wedge feeding horizontal compensation

A micro-displacement and horizontal technology, which is applied in the direction of metal processing machinery parts, metal processing equipment, feeding devices, etc., can solve the problems of small working stroke, low precision, low positioning precision, etc., and achieve the effect of short stroke and low precision

Inactive Publication Date: 2017-05-10
HENAN POLYTECHNIC UNIV
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AI Technical Summary

Problems solved by technology

In the micro-feeding mechanism, the contradiction between large stroke and high precision still exists, and the micro-feeding mechanism developed at present can only satisfy one of them, but not the other.
For example, although the piezoelectric ceramic micro-feed mechanism has high positioning accuracy (less than 0.01 μm), its working stroke is too

Method used

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  • Z-direction micro displacement structure based on wedge feeding horizontal compensation
  • Z-direction micro displacement structure based on wedge feeding horizontal compensation

Examples

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Example Embodiment

[0015] Such as figure 1 with figure 2 As shown, a Z-direction micro-displacement structure based on wedge-shaped feed level compensation of the present invention includes a first mounting frame 1, a second mounting frame 2, a first linear slide 3, a second linear slide 4, and a A servo motor 5, a second servo motor 6, a first wedge block 7, a second wedge block 8, a first ball screw 9, a second ball screw 10, a first sliding base 11, a second sliding base 12, a first A polished rod guide rail 13, a second polished rod guide rail 14, a first support base 15 and a second support base 16;

[0016] The first linear slide rail 3 is horizontally arranged on the first mounting frame 1 along the left and right direction. The upper left and upper right parts of the first mounting frame 1 are respectively provided with a first bracket 17, a first polished rod guide 13, and a first ball The screw 9 and the first linear slide 3 are arranged in parallel, the two ends of the first polished r...

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Abstract

The invention discloses a Z-direction micro displacement structure based on wedge feeding horizontal compensation. The structure mainly comprises two servo motors, linear sliding rails, a sliding table base, a ball screw, a supporting base, a polished rod guide rail and wedge blocks. One linear sliding rail is fixed to a platform, and the sliding table base is connected with one wedge block; the other linear sliding rail is fixed to the first wedge, a linear table base is connected with the second wedge block, and the polished guide rail is connected with the outer bottom of the linear sliding rail. Besides, by means of the wedge blocks, an included angle can be formed between displacement in the horizontal direction and displacement in the vertical direction. The structure can meet the Z-direction micro-feeding requirement during large-load precise and ultra-precise processing, a closed-loop control system can be built through a horizontal displacement measurement method by means of the wedge right-angle relation, the displacement amount in the horizontal direction is compensated for, feeding at the precision of the micron level is achieved, and the problems that an existing micro displacement mechanism is low in loading capacity and the feeding amount in the Z-axis direction is small are solved.

Description

technical field [0001] The invention belongs to the technical field of precision and ultra-precision machining, and in particular relates to a Z-direction micro-displacement structure based on wedge feed level compensation. Background technique [0002] In recent years, with the development of microelectronics technology, aerospace, bioengineering and other disciplines, micro-displacement technology, one of the key technologies of precision machinery and precision instruments, has also developed rapidly. In precision instruments, micro-displacement technology is inseparable from precise positioning over a long range or optical alignment within a small range. Micro-displacement technology has become the common basis of modern precision instrument industry. It is an important symbol to measure a country's scientific and technological level. It represents the level of a country's processing technology. The level of displacement technology also reflects a country's comprehensive...

Claims

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Application Information

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IPC IPC(8): B23Q5/40
CPCB23Q5/40
Inventor 闫艳燕孙珍宝崔晓斌郭强李瑜张成
Owner HENAN POLYTECHNIC UNIV
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