Z-direction micro displacement structure based on wedge feeding horizontal compensation

Abstract

The invention discloses a Z-direction micro displacement structure based on wedge feeding horizontal compensation. The structure mainly comprises two servo motors, linear sliding rails, a sliding table base, a ball screw, a supporting base, a polished rod guide rail and wedge blocks. One linear sliding rail is fixed to a platform, and the sliding table base is connected with one wedge block; the other linear sliding rail is fixed to the first wedge, a linear table base is connected with the second wedge block, and the polished guide rail is connected with the outer bottom of the linear sliding rail. Besides, by means of the wedge blocks, an included angle can be formed between displacement in the horizontal direction and displacement in the vertical direction. The structure can meet the Z-direction micro-feeding requirement during large-load precise and ultra-precise processing, a closed-loop control system can be built through a horizontal displacement measurement method by means of the wedge right-angle relation, the displacement amount in the horizontal direction is compensated for, feeding at the precision of the micron level is achieved, and the problems that an existing micro displacement mechanism is low in loading capacity and the feeding amount in the Z-axis direction is small are solved.

Description

technical field [0001] The invention belongs to the technical field of precision and ultra-precision machining, and in particular relates to a Z-direction micro-displacement structure based on wedge feed level compensation. Background technique [0002] In recent years, with the development of microelectronics technology, aerospace, bioengineering and other disciplines, micro-displacement technology, one of the key technologies of precision machinery and precision instruments, has also developed rapidly. In precision instruments, micro-displacement technology is inseparable from precise positioning over a long range or optical alignment within a small range. Micro-displacement technology has become the common basis of modern precision instrument industry. It is an important symbol to measure a country's scientific and technological level. It represents the level of a country's processing technology. The level of displacement technology also reflects a country's comprehensive...

AI Technical Summary

Problems solved by technology

In the micro-feeding mechanism, the contradiction between large stroke and high precision still exists, and the micro-feeding mechanism developed at present can only satisfy one of them, but not the other.

For example, although the piezoelectric ceramic micro-feed mechanism has high positioning accuracy (less than 0.01 μm), its working stroke is too small, while the mechanical transmission micro-feed mechanism can reach a large working stroke, but its positioning accuracy is not high.

The existing micro-displacement mechanism has the disadvantages of low load, small Z-direction (height direction) feed, small compound degree, and low precision

Mature methods and products have not been solved so far

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