Technology for fusing carbon-carbon bonds of carbon nanotubes by means of electron beam irradiation

Abstract

The invention discloses a technology for fusing carbon-carbon bonds of carbon nanotubes by means of electron beam irradiation. The technology comprises the steps that a, multiwalled carbon nanotubes are selected by means of an atomic force microscope probe 1; b, the multiwalled carbon nanotubes are connected to the atomic force microscope probe in a lapped mode to make the multiwalled carbon nanotubes broken; c, two sections of the multiwalled carbon nanotubes are in contact, electron beams are focused by a scanning electron microscope to deposit the multiwalled carbon nanotubes on the joint, so that two sections of suspended carbon-carbon bonds are recovered, and then the carbon nanotubes are fused; d, the fused multiwalled carbon nanotubes are broken; e, the broken ends of the two broken sections of multiwalled carbon nanotubes are made in contact, an electronic gun is turned off after contact, and after the electronic gun is turned on, the multiwalled carbon nanotubes in contact are broken. A nanometer device prepared from the carbon nanotubes can be precisely connected at any angle, accordingly the requirements for manufacturing of nanometer devices are met, a low-temperature controllable connection method for the carbon nanotubes is achieved, and interconnection of the carbon nanotubes can be precisely conducted on some fusion point under the scanning electron microscope with a high resolution (1.5 nm).

Description

technical field [0001] The invention belongs to the technical field of nano-interconnection, and in particular relates to a technology for fusing carbon nanotubes by irradiating carbon-carbon bonds with electron beams. Background technique [0002] In the 21st century, with the development of nanotechnology and the size limit of electronic devices, in order to meet the needs of rapid development, the demand for device size miniaturization, functionalization and integration has increased. It is a big challenge to use nanotechnology to manufacture smaller nanodevices. The development trend can promote the development goals of human society intelligence, green environmental protection, energy saving and low consumption. Nanotechnology is an important technical means of development. To further improve the development of nanoscale interconnection technology is the key to promote the connection between nanomaterials and individual components in the same chip. Carbon nanotubes can...

AI Technical Summary

Problems solved by technology

The controllable carbon nanotube connection methods include Joule heat welding, electron beam welding, and atomic force microscope welding, but each has advantages and disadvantages, such as excessive melting, damage to the carbon nanotube itself, and significant damage to the substrate, and the carbon The geometry of the nanometer, the relative position and the contact gap have a great influence on

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